JPS6415474A - Vacuum evacuator - Google Patents

Vacuum evacuator

Info

Publication number
JPS6415474A
JPS6415474A JP17232487A JP17232487A JPS6415474A JP S6415474 A JPS6415474 A JP S6415474A JP 17232487 A JP17232487 A JP 17232487A JP 17232487 A JP17232487 A JP 17232487A JP S6415474 A JPS6415474 A JP S6415474A
Authority
JP
Japan
Prior art keywords
vacuum
ion pump
vacuumed
case
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17232487A
Other languages
Japanese (ja)
Inventor
Toshihiro Ishizuka
Akio Ito
Kazuyuki Ozaki
Kazuo Okubo
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17232487A priority Critical patent/JPS6415474A/en
Publication of JPS6415474A publication Critical patent/JPS6415474A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE:To improve reliability the vacuum keeping performance of a vacuum evacuator including a vacuum valve and an ion pump by providing a screening part between the vacuum valve and the ion pump to enable sheilding of a solid substance from the ion pump. CONSTITUTION:A vacuum evacuator has an ion pump 13 which is connected to a case 11 to be vacuumed for housing an electron beam device or the like through a vacuum valve 12. An O-ring 18, which keeps vacuum at closing of the valve and is freely opened/closed by means of a switching means 19, is fitted to the outer periphery of the vacuum valve 12. The ion pump 13 is connected to the case 11 to be vacuumed through a joint 14. In such a device, a screening part 21 is arranged between the case 11 to be vacuumed and the ion pump 13, for example, in the vicinity of the gasket of the joint 14. The screening part 21 is constructed by assembling in steps metal circular screening plates 21a with a ring-shaped screening plate 21b. As a result, a solid substance 20 from the side of the pump 13 can be screened.
JP17232487A 1987-07-10 1987-07-10 Vacuum evacuator Pending JPS6415474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17232487A JPS6415474A (en) 1987-07-10 1987-07-10 Vacuum evacuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17232487A JPS6415474A (en) 1987-07-10 1987-07-10 Vacuum evacuator

Publications (1)

Publication Number Publication Date
JPS6415474A true JPS6415474A (en) 1989-01-19

Family

ID=15939796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17232487A Pending JPS6415474A (en) 1987-07-10 1987-07-10 Vacuum evacuator

Country Status (1)

Country Link
JP (1) JPS6415474A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129776A (en) * 1991-02-22 1992-07-14 Peng Luke S Roadside parking system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129776A (en) * 1991-02-22 1992-07-14 Peng Luke S Roadside parking system

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