JPS6415474A - Vacuum evacuator - Google Patents
Vacuum evacuatorInfo
- Publication number
- JPS6415474A JPS6415474A JP17232487A JP17232487A JPS6415474A JP S6415474 A JPS6415474 A JP S6415474A JP 17232487 A JP17232487 A JP 17232487A JP 17232487 A JP17232487 A JP 17232487A JP S6415474 A JPS6415474 A JP S6415474A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- ion pump
- vacuumed
- case
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Compressor (AREA)
Abstract
PURPOSE:To improve reliability the vacuum keeping performance of a vacuum evacuator including a vacuum valve and an ion pump by providing a screening part between the vacuum valve and the ion pump to enable sheilding of a solid substance from the ion pump. CONSTITUTION:A vacuum evacuator has an ion pump 13 which is connected to a case 11 to be vacuumed for housing an electron beam device or the like through a vacuum valve 12. An O-ring 18, which keeps vacuum at closing of the valve and is freely opened/closed by means of a switching means 19, is fitted to the outer periphery of the vacuum valve 12. The ion pump 13 is connected to the case 11 to be vacuumed through a joint 14. In such a device, a screening part 21 is arranged between the case 11 to be vacuumed and the ion pump 13, for example, in the vicinity of the gasket of the joint 14. The screening part 21 is constructed by assembling in steps metal circular screening plates 21a with a ring-shaped screening plate 21b. As a result, a solid substance 20 from the side of the pump 13 can be screened.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17232487A JPS6415474A (en) | 1987-07-10 | 1987-07-10 | Vacuum evacuator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17232487A JPS6415474A (en) | 1987-07-10 | 1987-07-10 | Vacuum evacuator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415474A true JPS6415474A (en) | 1989-01-19 |
Family
ID=15939796
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17232487A Pending JPS6415474A (en) | 1987-07-10 | 1987-07-10 | Vacuum evacuator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415474A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5129776A (en) * | 1991-02-22 | 1992-07-14 | Peng Luke S | Roadside parking system |
-
1987
- 1987-07-10 JP JP17232487A patent/JPS6415474A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5129776A (en) * | 1991-02-22 | 1992-07-14 | Peng Luke S | Roadside parking system |
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