JPS62169463U - - Google Patents
Info
- Publication number
- JPS62169463U JPS62169463U JP5765686U JP5765686U JPS62169463U JP S62169463 U JPS62169463 U JP S62169463U JP 5765686 U JP5765686 U JP 5765686U JP 5765686 U JP5765686 U JP 5765686U JP S62169463 U JPS62169463 U JP S62169463U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- electron beam
- beam processing
- protection plate
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 239000003566 sealing material Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Description
第１図はこの考案の一実施例にかかる開閉弁と
保護プレートを示す断面図、第２図は従来電子ビ
ーム加工装置の電子銃室を示す断面図、第３図は
開閉弁と保護プレートを示す断面図である。
図において、１は装置本体、３ａは高真空側電
子銃室、３ｂは低真空側銃室、６は電子銃、７は
仕切体、７ａは透孔、７ｂは弁座、１１は開閉弁
、１１ａは環状溝、１３はシール材、１９は保護
プレート、１９ａは平面部、１９ｂは側壁部であ
る。なお、図中同一符号は同一または相当部分を
示す。
Fig. 1 is a sectional view showing an on-off valve and a protection plate according to an embodiment of the invention, Fig. 2 is a sectional view showing an electron gun chamber of a conventional electron beam processing device, and Fig. 3 is a sectional view showing an on-off valve and a protection plate. FIG. In the figure, 1 is the device main body, 3a is the high vacuum side electron gun chamber, 3b is the low vacuum side gun chamber, 6 is the electron gun, 7 is the partition, 7a is the through hole, 7b is the valve seat, 11 is the on-off valve, 11a is an annular groove, 13 is a sealing material, 19 is a protection plate, 19a is a plane portion, and 19b is a side wall portion. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
子銃室と低真空側電子銃室とに仕切体と、この仕
切体の弁座を開閉自在に閉塞するシール材を有す
る開閉弁と、この開閉弁の上記シール材を配設し
た正面と側面とをしや蔽する保護プレートとによ
つて構成されていることを特徴とする電子ビーム
加工装置。 (2) 保護プレートは開閉弁の正面に対向してこ
れをしや蔽する平面部と、開閉弁の側面に対向し
てこれをしや蔽する側壁部とによつて構成されて
いることを特徴とする実用新案登録請求の範囲第
１項記載の電子ビーム加工装置。 (3) 仕切体の弁座に対応する開閉弁の正面に形
成した環状溝内に、ゴム材等のＯリングからなる
シール材を嵌め込んだことを特徴とする実用新案
登録請求の範囲第１項記載の電子ビーム加工装置
。 (4) 保護プレートは、引張りばねにより常時開
閉弁に向つて付勢されていることを特徴とする特
許請求の範囲第１項記載の電子ビーム加工装置。[Scope of Claim for Utility Model Registration] (1) A partition body is provided between the high vacuum side electron gun chamber and the low vacuum side electron gun chamber housing the electron gun in the main body of the device, and a valve seat of this partition body is closed so as to be openable and closable. 1. An electron beam processing apparatus comprising: an on-off valve having a sealing material; and a protection plate that shields the front and side surfaces of the on-off valve, on which the sealing material is disposed. (2) The protection plate is composed of a flat part that faces the front of the on-off valve and covers it, and a side wall part that faces the side of the on-off valve and covers it. An electron beam processing apparatus according to claim 1, characterized in that it is a utility model. (3) Utility model registration claim 1, which is characterized in that a sealing material made of an O-ring made of rubber material or the like is fitted into an annular groove formed on the front face of the on-off valve corresponding to the valve seat of the partition body. The electron beam processing device described in Section 1. (4) The electron beam processing apparatus according to claim 1, wherein the protection plate is always urged toward the on-off valve by a tension spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057656U JPH0612604Y2 (en) | 1986-04-18 | 1986-04-18 | Electronic beam processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986057656U JPH0612604Y2 (en) | 1986-04-18 | 1986-04-18 | Electronic beam processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62169463U true JPS62169463U (en) | 1987-10-27 |
| JPH0612604Y2 JPH0612604Y2 (en) | 1994-03-30 |
Family
ID=30887565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986057656U Expired - Lifetime JPH0612604Y2 (en) | 1986-04-18 | 1986-04-18 | Electronic beam processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612604Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094852U (en) * | 1973-12-29 | 1975-08-08 |
-
1986
- 1986-04-18 JP JP1986057656U patent/JPH0612604Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5094852U (en) * | 1973-12-29 | 1975-08-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612604Y2 (en) | 1994-03-30 |
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