JPH0612604Y2 - Electronic beam processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION In this invention, a work piece is placed in a vacuum atmosphere (about 10 ⁻⁵ mmHg), and an electron beam accelerated by a high voltage is focused on the work piece by a focusing lens (also called an electron lens). When the work piece is irradiated with the work piece, most of its kinetic energy is converted into heat energy, so that the part irradiated with this electron beam is heated and reaches the melting point of the material in 1 to 10 μs, for example.
The present invention relates to an electron beam processing apparatus that performs a predetermined process (drilling, cutting, welding, melting, vapor deposition, etc.) by evaporating a material and the evaporation pressure thereof. In particular, the present invention relates to an electron beam processing apparatus that generates an electron beam inside the apparatus body. The present invention relates to protection of a sealing material for an on-off valve that opens and closes a partition body that divides a high vacuum side electron gun chamber containing a gun and a low vacuum electron gun chamber.

[Prior Art] FIGS. 2 and 3 are sectional views showing an electron gun chamber, an on-off valve and a protection plate of a conventional electron beam processing apparatus disclosed in, for example, Japanese Utility Model Laid-Open No. 59-10986. In Fig. 2, (1) is the internal high vacuum side electron gun chamber (3
a) and a device body partitioned into a low vacuum side electron gun chamber (3b), and a cathode (4) to which a negative electron acceleration voltage is applied in the high vacuum side electron gun chamber (3a). And an electron gun (6) consisting of a grounded anode (5). (7) is for the above partition wall
It is attached to the center of (2) with a plurality of mounting bolts (8), and the through hole (7
A partition body having (a) and a valve seat (7b) to and from which an on-off valve (11) described later for opening and closing the through hole can be opened and closed,
Is a rotating shaft (12) near the valve seat (7b) of this partition (7).
The on-off valve which is integrally and repeatedly rotatable with the partition body (7) to open and close the valve seat (7b).
An annular groove (11) formed on the surface of (11) corresponding to the valve seat (7b).
As shown in FIG. 3, the inside of a) is elastically contacted with the valve seat (7b) of the partition body (7) to hermetically seal the valve seat (7b), that is, the through hole (7a). A sealing material (13) made of an "O-ring" such as a rubber material, which is closed off, is fitted therein. (14) is a protection plate that is repeatedly rotatably supported by a support shaft (15) in the vicinity of the on-off valve (11), and the free end of the protection plate (14) has this protection plate (14). As shown in FIG. 2, when it is rotated counterclockwise, it comes into contact with the valve seat (7b) of the partition body (7), and the free end of the protection plate (14) has an electron beam. A small hole (14a) is formed to allow (9) to pass through. (16) is a tension spring for constantly biasing the protection plate (14) in a counterclockwise direction, and the opening / closing valve (11) opens the valve seat (7b) of the partition body (7) as shown in FIG. When the protective plate (14) is brought close to the on-off valve (11) while it is open, and the workpiece (17) in the machining chamber (18) is irradiated with the electron beam (9) to perform the prescribed machining. Metal vapor and X-rays generated in
In addition, the sealing material (13) of the on-off valve (11) is protected from rapid deterioration by scattered electrons generated when the electron beam (9) passes through the partition body (7).

When the predetermined processing of the workpiece (17) is completed, the opening / closing valve (11) is rotated counterclockwise via the rotation shaft (12),
As shown by the alternate long and short dash line, the sealing material (13) for this on-off valve (11)
Since the high vacuum side electron gun chamber (3a) and the low vacuum side electron gun chamber (3b) are airtightly separated by pressing the valve seat (7b) of the partition body (7), the processing chamber ( The workpiece (17) in 18) can be taken out of the main body (1) of the device, but at this time, the high vacuum side electron gun chamber (3a) is evacuated in preparation for the next electron beam processing. Needless to say Also, the work piece
When the opening / closing valve (11) is rotated counterclockwise after finishing the predetermined processing for (17), the opening / closing valve (11) engages with the above-mentioned protection plate (14) and the tension spring (16) ) To rotate in the clockwise direction to avoid it as indicated by the one-dot chain line.

[Problems to be Solved by the Invention] In the conventional electron beam processing apparatus described above, a partition body (7) for the high vacuum side electron gun chamber (3a) and the low vacuum side electron gun chamber (3b)
The sealing material (13) of the on-off valve (11) for opening and closing the valve is a flat surface facing the front of the on-off valve (11) with a predetermined gap in the sealing material (13) as shown in FIG. Protective plate (14)
Therefore, the scattered electron beam, the metal vapor and the X-ray are protected from the scattered electron beam, the metal vapor and the X-ray as shown by the arrow from the side surface of the flat protective plate (14). There is a drawback that it enters toward 11) and accelerates the deterioration of the sealing material (13).

This invention has been made in view of this point, and has an electron beam processing having a protective plate that prevents scattered electron beams, metal vapor, and X-rays from entering the sealing material (13) of the on-off valve (11). It is intended to provide a device.

[Means for Solving the Problems] An electron beam processing apparatus according to the present invention includes a high vacuum side first electron gun chamber accommodating an electron gun and a low vacuum side second chamber accommodating a workpiece. A partition body is arranged between the electron gun chamber and the electron gun so that the electron beam emitted from the electron gun passes through the through hole of the partition body so that the electron beam can be applied to the work piece, and the work piece is In an electron beam processing apparatus in which a through-hole is hermetically closed by an opening / closing valve having a sealing material when taken out from an electron gun chamber, a sealing material for the opening / closing valve is attached when an electron beam is irradiated. A protective plate having a flat surface portion facing the front surface to shield the front surface and a side wall portion facing the side surface of the opening / closing valve to shield the side surface is provided, and the opening / closing valve rotates in the direction of closing the through hole. The protective plate when it is It is configured so as to be separated from the position facing the lumber.

[Operation] In the present invention, the protection plate includes a flat surface portion that faces the front surface of the opening / closing valve on which the sealing material is attached and shields the front surface when the electron beam is irradiated, and a side surface of the opening / closing valve. Since the side wall portions are provided so as to oppose each other and shield the side surface, it is possible to protect the sealing material of the on-off valve from the scattered electron beam, the metal vapor and the X-ray.

[Embodiment of the Invention] FIG. 1 shows an opening / closing valve and a protection plate according to an embodiment of the present invention. The electron gun chamber of the electron beam processing apparatus using the opening / closing valve and the protection plate has been described above. Since it is the same as the conventional one, its explanation is omitted.

Reference numeral (19) is a protection plate which is repeatedly and rotatably supported by a support shaft (15) near the opening / closing valve (11).
Is a flat part (19a) facing the front of the on-off valve (11) to which the seal material (13) is attached, and a flat part (19a) facing the front of the on-off valve (11). The side wall portions (19b) and (19b) are formed.

[Advantages of the Invention] As described above, the invention has a partition in which a through hole through which an electron beam passes is formed between the first electron gun chamber on the high vacuum side and the second electron gun chamber on the low vacuum side. An electron beam is irradiated in an electron beam processing apparatus that has a body and is configured such that when a workpiece is taken out of the second electron gun chamber, a through hole of a partition body is closed by an opening / closing valve having a sealing material. Occasionally, a protective plate having a flat surface portion facing the front surface on which the sealing material of the opening / closing valve is mounted and shielding the front surface and a side wall portion facing the side surface of the opening / closing valve and shielding the side surface are provided Therefore, scattered electron beams and metal vapor and X-rays do not enter the sealing material of the on-off valve, and it is possible to prevent early deterioration of the sealing material, and a stable electron beam processing device for a long period of time. Excellent practical use that can be expected to drive Have a positive effect.

[Brief description of drawings]

1 is a sectional view showing an on-off valve and a protective plate according to an embodiment of the present invention, FIG. 2 is a sectional view showing an electron gun chamber of a conventional electron beam processing apparatus, and FIG. 3 is an on-off valve and a protective plate. FIG. In the figure, (1) is the apparatus main body, (3a) is the high vacuum side electron gun chamber, (3b) is the low vacuum side gun chamber, (6) is the electron gun, (7) is a partition,
(7a) is a through hole, (7b) is a valve seat, (11) is an on-off valve, (11a) is an annular groove, (13) is a sealing material, (19) is a protective plate, (19a) is a flat part, ( 19b) is a side wall. The same reference numerals in the drawings indicate the same or corresponding parts.

Claims (1)

[Scope of utility model registration request] 1. A partition body is arranged between a high vacuum side first electron gun chamber accommodating an electron gun and a low vacuum side second electron gun chamber accommodating a work, and the electron is provided. The electron beam emitted from the gun passes through the through hole of the partition body so that the electron beam can irradiate the work piece, and when the work piece is taken out of the second electron gun chamber, In an electron beam processing apparatus in which an opening / closing valve having a sealing material is used to hermetically close the hole, when facing the front surface of the opening / closing valve on which the sealing material is attached, when the electron beam is irradiated. When a protective plate having a flat surface portion that shields the front surface and a side wall portion that faces the side surface of the opening / closing valve and shields the side surface is provided, and the opening / closing valve rotates in a direction to close the through hole Press the protection plate so that the protection plate Electron beam machining apparatus characterized by being configured to disengage from the sealing material facing the position of the valve closing.