JPS5638467A - Aluminum oxide composition for deposition - Google Patents

Aluminum oxide composition for deposition

Info

Publication number
JPS5638467A
JPS5638467A JP11310079A JP11310079A JPS5638467A JP S5638467 A JPS5638467 A JP S5638467A JP 11310079 A JP11310079 A JP 11310079A JP 11310079 A JP11310079 A JP 11310079A JP S5638467 A JPS5638467 A JP S5638467A
Authority
JP
Japan
Prior art keywords
aluminum oxide
substrate
production
chemically stable
titanium oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11310079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6128027B2 (enrdf_load_stackoverflow
Inventor
Noboru Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11310079A priority Critical patent/JPS5638467A/ja
Publication of JPS5638467A publication Critical patent/JPS5638467A/ja
Publication of JPS6128027B2 publication Critical patent/JPS6128027B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP11310079A 1979-09-04 1979-09-04 Aluminum oxide composition for deposition Granted JPS5638467A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11310079A JPS5638467A (en) 1979-09-04 1979-09-04 Aluminum oxide composition for deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11310079A JPS5638467A (en) 1979-09-04 1979-09-04 Aluminum oxide composition for deposition

Publications (2)

Publication Number Publication Date
JPS5638467A true JPS5638467A (en) 1981-04-13
JPS6128027B2 JPS6128027B2 (enrdf_load_stackoverflow) 1986-06-28

Family

ID=14603475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11310079A Granted JPS5638467A (en) 1979-09-04 1979-09-04 Aluminum oxide composition for deposition

Country Status (1)

Country Link
JP (1) JPS5638467A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102441U (enrdf_load_stackoverflow) * 1977-12-08 1979-07-19
JPS54118364U (enrdf_load_stackoverflow) * 1978-02-08 1979-08-18
JPS5922661A (ja) * 1982-07-09 1984-02-04 グレ−タ−・マンチエスタ−・カウンシル ごみ処理方法およびプラント
JPS63144466U (enrdf_load_stackoverflow) * 1987-03-11 1988-09-22
US6903375B1 (en) 1999-07-13 2005-06-07 Matsushita Electric Industrial Co., Ltd. Solid-state image device, camera using the same, and method of manufacturing the same
CN109503149A (zh) * 2018-11-27 2019-03-22 北京富兴凯永兴光电技术有限公司 一种高折射率光学镀膜材料及制备方法、光学增透膜
GB2565190B (en) * 2017-06-02 2020-11-04 Sensata Technologies Inc Alumina diffusion barrier for sensing elements

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102441U (enrdf_load_stackoverflow) * 1977-12-08 1979-07-19
JPS54118364U (enrdf_load_stackoverflow) * 1978-02-08 1979-08-18
JPS5922661A (ja) * 1982-07-09 1984-02-04 グレ−タ−・マンチエスタ−・カウンシル ごみ処理方法およびプラント
JPS63144466U (enrdf_load_stackoverflow) * 1987-03-11 1988-09-22
US6903375B1 (en) 1999-07-13 2005-06-07 Matsushita Electric Industrial Co., Ltd. Solid-state image device, camera using the same, and method of manufacturing the same
GB2565190B (en) * 2017-06-02 2020-11-04 Sensata Technologies Inc Alumina diffusion barrier for sensing elements
CN109503149A (zh) * 2018-11-27 2019-03-22 北京富兴凯永兴光电技术有限公司 一种高折射率光学镀膜材料及制备方法、光学增透膜

Also Published As

Publication number Publication date
JPS6128027B2 (enrdf_load_stackoverflow) 1986-06-28

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