JPH0158267B2 - - Google Patents
Info
- Publication number
- JPH0158267B2 JPH0158267B2 JP62250298A JP25029887A JPH0158267B2 JP H0158267 B2 JPH0158267 B2 JP H0158267B2 JP 62250298 A JP62250298 A JP 62250298A JP 25029887 A JP25029887 A JP 25029887A JP H0158267 B2 JPH0158267 B2 JP H0158267B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide
- cerium oxide
- sputtering
- cerium
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25029887A JPH0192365A (ja) | 1987-10-02 | 1987-10-02 | 真空蒸着又はスパッタ用酸化セリウム組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25029887A JPH0192365A (ja) | 1987-10-02 | 1987-10-02 | 真空蒸着又はスパッタ用酸化セリウム組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0192365A JPH0192365A (ja) | 1989-04-11 |
| JPH0158267B2 true JPH0158267B2 (enrdf_load_stackoverflow) | 1989-12-11 |
Family
ID=17205824
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25029887A Granted JPH0192365A (ja) | 1987-10-02 | 1987-10-02 | 真空蒸着又はスパッタ用酸化セリウム組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0192365A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0339467A (ja) * | 1989-07-06 | 1991-02-20 | Matsushita Electric Ind Co Ltd | スパッタ用ターゲットの製造方法 |
| TWI249164B (en) | 2001-11-22 | 2006-02-11 | Tdk Corp | Optical recording medium |
-
1987
- 1987-10-02 JP JP25029887A patent/JPH0192365A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0192365A (ja) | 1989-04-11 |
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