JPS5619449A - Sensing element for chlorine gas pressure - Google Patents

Sensing element for chlorine gas pressure

Info

Publication number
JPS5619449A
JPS5619449A JP9528079A JP9528079A JPS5619449A JP S5619449 A JPS5619449 A JP S5619449A JP 9528079 A JP9528079 A JP 9528079A JP 9528079 A JP9528079 A JP 9528079A JP S5619449 A JPS5619449 A JP S5619449A
Authority
JP
Japan
Prior art keywords
layer
chlorine gas
gas pressure
pressure
chlorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9528079A
Other languages
Japanese (ja)
Other versions
JPS6128297B2 (en
Inventor
Koji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Research in Inorganic Material
Original Assignee
National Institute for Research in Inorganic Material
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute for Research in Inorganic Material filed Critical National Institute for Research in Inorganic Material
Priority to JP9528079A priority Critical patent/JPS5619449A/en
Publication of JPS5619449A publication Critical patent/JPS5619449A/en
Publication of JPS6128297B2 publication Critical patent/JPS6128297B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To make it possible to take an instantaneous measurement of variation in chlorine gas pressure continuously over a wide concentration range, by employing an element of Al-Al2O3-Au three-layer structure.
CONSTITUTION: This chlorine-gas-pressure sensing element employs a three-layer structure element made of Al layer 1, an Al2O3 layer 2 and Au layer 3 provided at right angles to Al layer 1 on glass substrate 4. In reduction in pressure, positive and negative voltages are applied to Au and Al respectively, and consequently a conduction path is formed extending from the Au pole to the Al electrode through Al2O3 layer 2, entailing the permanent resistance change (forming) that a resistance value lessens. When chlorine gas is supplied to the element in the forming state with its pressure changed, current-voltage characteristics vary with the chlorine gas pressure. Namely, since the electric current and voltage are in proportion to -log (chlorine gas pressure), the chlorine gas pressure can be measured with excellent reproducibility.
COPYRIGHT: (C)1981,JPO&Japio
JP9528079A 1979-07-26 1979-07-26 Sensing element for chlorine gas pressure Granted JPS5619449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9528079A JPS5619449A (en) 1979-07-26 1979-07-26 Sensing element for chlorine gas pressure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9528079A JPS5619449A (en) 1979-07-26 1979-07-26 Sensing element for chlorine gas pressure

Publications (2)

Publication Number Publication Date
JPS5619449A true JPS5619449A (en) 1981-02-24
JPS6128297B2 JPS6128297B2 (en) 1986-06-30

Family

ID=14133356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9528079A Granted JPS5619449A (en) 1979-07-26 1979-07-26 Sensing element for chlorine gas pressure

Country Status (1)

Country Link
JP (1) JPS5619449A (en)

Also Published As

Publication number Publication date
JPS6128297B2 (en) 1986-06-30

Similar Documents

Publication Publication Date Title
JPS5618750A (en) Gas detector
KR900019223A (en) Transistor with Current Detection Function
JPS57192855A (en) Oxygen concentration detector
JPS5619449A (en) Sensing element for chlorine gas pressure
JPS6435359A (en) Air fuel ratio detecting element
JPS5587941A (en) Humidity sensor
JPS5797230A (en) Magnetic sensor switch device
JPS647493A (en) Heater with positive temperature coefficient of resistance
JPS5485043A (en) Heat sensitive head
JPS57121288A (en) Hall element
JPS52141257A (en) Sonde for detecting charged stacking layer thickness
JPS55166032A (en) Gas detecting element and gas detecting method
JPS5797231A (en) Magnetic sensor switch device
JPS5621359A (en) Semiconductor device
JPS5788521A (en) Magnetic resistance effect head
JPS56126756A (en) Humidity-sensitive element
JPS55111184A (en) Reluctance unit and manufacturing method thereof
JPS5635454A (en) Semiconductor device
FR2368802A1 (en) Semiconductor current generator - activated by sensitivity to gas or vapour esp. smoke
JPS5799764A (en) Semiconductor device
JPS54107759A (en) Temperature-humidity sensor
JPS54104398A (en) Gas sensitive element
JPS57160173A (en) Manufacture of semiconductor pressure converter
JPS5485065A (en) Liquid level gauge
JPS57132004A (en) Detector