JPS5619449A - Sensing element for chlorine gas pressure - Google Patents
Sensing element for chlorine gas pressureInfo
- Publication number
- JPS5619449A JPS5619449A JP9528079A JP9528079A JPS5619449A JP S5619449 A JPS5619449 A JP S5619449A JP 9528079 A JP9528079 A JP 9528079A JP 9528079 A JP9528079 A JP 9528079A JP S5619449 A JPS5619449 A JP S5619449A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- chlorine gas
- gas pressure
- pressure
- chlorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To make it possible to take an instantaneous measurement of variation in chlorine gas pressure continuously over a wide concentration range, by employing an element of Al-Al2O3-Au three-layer structure.
CONSTITUTION: This chlorine-gas-pressure sensing element employs a three-layer structure element made of Al layer 1, an Al2O3 layer 2 and Au layer 3 provided at right angles to Al layer 1 on glass substrate 4. In reduction in pressure, positive and negative voltages are applied to Au and Al respectively, and consequently a conduction path is formed extending from the Au pole to the Al electrode through Al2O3 layer 2, entailing the permanent resistance change (forming) that a resistance value lessens. When chlorine gas is supplied to the element in the forming state with its pressure changed, current-voltage characteristics vary with the chlorine gas pressure. Namely, since the electric current and voltage are in proportion to -log (chlorine gas pressure), the chlorine gas pressure can be measured with excellent reproducibility.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9528079A JPS5619449A (en) | 1979-07-26 | 1979-07-26 | Sensing element for chlorine gas pressure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9528079A JPS5619449A (en) | 1979-07-26 | 1979-07-26 | Sensing element for chlorine gas pressure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5619449A true JPS5619449A (en) | 1981-02-24 |
JPS6128297B2 JPS6128297B2 (en) | 1986-06-30 |
Family
ID=14133356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9528079A Granted JPS5619449A (en) | 1979-07-26 | 1979-07-26 | Sensing element for chlorine gas pressure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5619449A (en) |
-
1979
- 1979-07-26 JP JP9528079A patent/JPS5619449A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6128297B2 (en) | 1986-06-30 |
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