JPS5587941A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5587941A
JPS5587941A JP15995078A JP15995078A JPS5587941A JP S5587941 A JPS5587941 A JP S5587941A JP 15995078 A JP15995078 A JP 15995078A JP 15995078 A JP15995078 A JP 15995078A JP S5587941 A JPS5587941 A JP S5587941A
Authority
JP
Japan
Prior art keywords
humidity sensor
heater
sensor
transformer
voltmeter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15995078A
Other languages
Japanese (ja)
Inventor
Shigeki Uno
Masaki Katsura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15995078A priority Critical patent/JPS5587941A/en
Publication of JPS5587941A publication Critical patent/JPS5587941A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To obtain an excellent responding property and a high aging property, by providing a pair of electrodes and using one of them also as a heater.
CONSTITUTION: An electrode 2 and another electrode 3, which serves also as a heater, are provided on a base board 5. A humidity sensor 11 made of a metal oxide semiconductor connected with lead wires 4 is provided. A circuit is composed of the humidity sensor 11, a fixed resistance 12, a voltmeter 13 and a transformer 14. When the resistance of the humidity sensor 11 changes, an electrical current flowing through the transformer 4, the humidity sensor 11 and the fixed resistance 13 varies. Therefore, the value pointed by the voltmeter changes. When the humidity sensor 11 is in operation, it is heated at a constant temperature by the heater 3 so that adsorbed excessive water molecules go off the surface of the sensor. This results in always stabilizing the characteristic of the sensor.
COPYRIGHT: (C)1980,JPO&Japio
JP15995078A 1978-12-27 1978-12-27 Humidity sensor Pending JPS5587941A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15995078A JPS5587941A (en) 1978-12-27 1978-12-27 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15995078A JPS5587941A (en) 1978-12-27 1978-12-27 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS5587941A true JPS5587941A (en) 1980-07-03

Family

ID=15704694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15995078A Pending JPS5587941A (en) 1978-12-27 1978-12-27 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5587941A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57154044A (en) * 1981-03-20 1982-09-22 Marcon Electronics Co Ltd Method for regeration of humidity sensitive element
JPS59178350A (en) * 1983-03-29 1984-10-09 Shinkosumosu Denki Kk Detecting element of gas
JPS59188549A (en) * 1983-04-11 1984-10-25 Shinkosumosu Denki Kk Two-terminal type semiconductor gas detecting element
JPS607062U (en) * 1983-06-28 1985-01-18 新コスモス電機株式会社 gas detection element
JPH04102458U (en) * 1991-01-24 1992-09-03 株式会社トーキン Resistive moisture sensing element
KR100486497B1 (en) * 2002-08-13 2005-04-29 엘지전자 주식회사 Humidity sensor equipped with heater and manufacturing method thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57154044A (en) * 1981-03-20 1982-09-22 Marcon Electronics Co Ltd Method for regeration of humidity sensitive element
JPS6148859B2 (en) * 1981-03-20 1986-10-27 Marukon Denshi Kk
JPS59178350A (en) * 1983-03-29 1984-10-09 Shinkosumosu Denki Kk Detecting element of gas
JPS59188549A (en) * 1983-04-11 1984-10-25 Shinkosumosu Denki Kk Two-terminal type semiconductor gas detecting element
JPH0312701B2 (en) * 1983-04-11 1991-02-20 New Cosmos Electric Co
JPS607062U (en) * 1983-06-28 1985-01-18 新コスモス電機株式会社 gas detection element
JPH0220681Y2 (en) * 1983-06-28 1990-06-05
JPH04102458U (en) * 1991-01-24 1992-09-03 株式会社トーキン Resistive moisture sensing element
KR100486497B1 (en) * 2002-08-13 2005-04-29 엘지전자 주식회사 Humidity sensor equipped with heater and manufacturing method thereof

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