JPS56169119A - Manufacture of trichlorosilane - Google Patents

Manufacture of trichlorosilane

Info

Publication number
JPS56169119A
JPS56169119A JP7035380A JP7035380A JPS56169119A JP S56169119 A JPS56169119 A JP S56169119A JP 7035380 A JP7035380 A JP 7035380A JP 7035380 A JP7035380 A JP 7035380A JP S56169119 A JPS56169119 A JP S56169119A
Authority
JP
Japan
Prior art keywords
furnace
silicon tetrachloride
trichlorosilane
activated carbon
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7035380A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131454B2 (cs
Inventor
Fukuhiko Suga
Kenji Tomizawa
Shinichiro Kobayashi
Katsumi Ogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP7035380A priority Critical patent/JPS56169119A/ja
Publication of JPS56169119A publication Critical patent/JPS56169119A/ja
Publication of JPH0131454B2 publication Critical patent/JPH0131454B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP7035380A 1980-05-27 1980-05-27 Manufacture of trichlorosilane Granted JPS56169119A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7035380A JPS56169119A (en) 1980-05-27 1980-05-27 Manufacture of trichlorosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7035380A JPS56169119A (en) 1980-05-27 1980-05-27 Manufacture of trichlorosilane

Publications (2)

Publication Number Publication Date
JPS56169119A true JPS56169119A (en) 1981-12-25
JPH0131454B2 JPH0131454B2 (cs) 1989-06-26

Family

ID=13428974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7035380A Granted JPS56169119A (en) 1980-05-27 1980-05-27 Manufacture of trichlorosilane

Country Status (1)

Country Link
JP (1) JPS56169119A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008062632A1 (fr) * 2006-11-21 2008-05-29 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
JP2008150274A (ja) * 2006-11-21 2008-07-03 Mitsubishi Materials Corp トリクロロシラン製造装置
WO2012015152A3 (ko) * 2010-07-27 2012-04-19 전북대학교산학협력단 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008062632A1 (fr) * 2006-11-21 2008-05-29 Mitsubishi Materials Corporation Appareil de production de trichlorosilane
JP2008150274A (ja) * 2006-11-21 2008-07-03 Mitsubishi Materials Corp トリクロロシラン製造装置
US8221691B2 (en) 2006-11-21 2012-07-17 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane
WO2012015152A3 (ko) * 2010-07-27 2012-04-19 전북대학교산학협력단 삼염화실란의 제조를 위한 사염화규소의 탈염소수소화 반응에 사용되는 촉매 및 그 제조방법

Also Published As

Publication number Publication date
JPH0131454B2 (cs) 1989-06-26

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