JPS56162466A - Picture display unit for scanning electron microscope etc. - Google Patents

Picture display unit for scanning electron microscope etc.

Info

Publication number
JPS56162466A
JPS56162466A JP6741880A JP6741880A JPS56162466A JP S56162466 A JPS56162466 A JP S56162466A JP 6741880 A JP6741880 A JP 6741880A JP 6741880 A JP6741880 A JP 6741880A JP S56162466 A JPS56162466 A JP S56162466A
Authority
JP
Japan
Prior art keywords
blanking
signal
observation
circuit
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6741880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0355935B2 (enrdf_load_stackoverflow
Inventor
Hironobu Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TEKUNIKUSU KK
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TEKUNIKUSU KK
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TEKUNIKUSU KK, NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TEKUNIKUSU KK
Priority to JP6741880A priority Critical patent/JPS56162466A/ja
Publication of JPS56162466A publication Critical patent/JPS56162466A/ja
Publication of JPH0355935B2 publication Critical patent/JPH0355935B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP6741880A 1980-05-21 1980-05-21 Picture display unit for scanning electron microscope etc. Granted JPS56162466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6741880A JPS56162466A (en) 1980-05-21 1980-05-21 Picture display unit for scanning electron microscope etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6741880A JPS56162466A (en) 1980-05-21 1980-05-21 Picture display unit for scanning electron microscope etc.

Publications (2)

Publication Number Publication Date
JPS56162466A true JPS56162466A (en) 1981-12-14
JPH0355935B2 JPH0355935B2 (enrdf_load_stackoverflow) 1991-08-26

Family

ID=13344334

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6741880A Granted JPS56162466A (en) 1980-05-21 1980-05-21 Picture display unit for scanning electron microscope etc.

Country Status (1)

Country Link
JP (1) JPS56162466A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0355935B2 (enrdf_load_stackoverflow) 1991-08-26

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