JPS56157841A - Detecting apparatus for surface defect of body - Google Patents

Detecting apparatus for surface defect of body

Info

Publication number
JPS56157841A
JPS56157841A JP6101080A JP6101080A JPS56157841A JP S56157841 A JPS56157841 A JP S56157841A JP 6101080 A JP6101080 A JP 6101080A JP 6101080 A JP6101080 A JP 6101080A JP S56157841 A JPS56157841 A JP S56157841A
Authority
JP
Japan
Prior art keywords
inspected
lens
light
image
focused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6101080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353493B2 (enrdf_load_stackoverflow
Inventor
Shuji Takaoka
Toshihiko Omichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP6101080A priority Critical patent/JPS56157841A/ja
Publication of JPS56157841A publication Critical patent/JPS56157841A/ja
Publication of JPS6353493B2 publication Critical patent/JPS6353493B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6101080A 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body Granted JPS56157841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Publications (2)

Publication Number Publication Date
JPS56157841A true JPS56157841A (en) 1981-12-05
JPS6353493B2 JPS6353493B2 (enrdf_load_stackoverflow) 1988-10-24

Family

ID=13158928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6101080A Granted JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Country Status (1)

Country Link
JP (1) JPS56157841A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150331A (ja) * 1983-02-16 1984-08-28 Toyota Tsusho Kk 球状又は円筒状表面を有する物体の表面検査装置
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム
CN112630232A (zh) * 2020-12-01 2021-04-09 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112666172A (zh) * 2020-12-01 2021-04-16 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置
CN112683918A (zh) * 2020-12-01 2021-04-20 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (enrdf_load_stackoverflow) * 1965-08-28 1969-03-05
JPS4963459A (enrdf_load_stackoverflow) * 1972-10-16 1974-06-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (enrdf_load_stackoverflow) * 1965-08-28 1969-03-05
JPS4963459A (enrdf_load_stackoverflow) * 1972-10-16 1974-06-19

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JPS59150331A (ja) * 1983-02-16 1984-08-28 Toyota Tsusho Kk 球状又は円筒状表面を有する物体の表面検査装置
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム
CN112630232A (zh) * 2020-12-01 2021-04-09 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112666172A (zh) * 2020-12-01 2021-04-16 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置
CN112683918A (zh) * 2020-12-01 2021-04-20 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置
CN112630232B (zh) * 2020-12-01 2021-12-03 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112683918B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置
CN112666172B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置

Also Published As

Publication number Publication date
JPS6353493B2 (enrdf_load_stackoverflow) 1988-10-24

Similar Documents

Publication Publication Date Title
DE69531805D1 (de) Inspektion einer Kontaktlinse mit einer Beleuchtung mit Doppelfokus
DE3776205D1 (de) Vorrichtung zum pruefen von bauteilen aud transparentem material auf oberflaechenfehler und einschluesse.
GB2126712A (en) Surface flaw inspection apparatus for a convex body
WO1998052025A1 (fr) Procede et instrument de controle de surface
JPS57150812A (en) Dark field illuminating optical system
JPS5713340A (en) Inspection apparatus for surface defect
DE3270640D1 (en) Off-axis light beam defect detector
JPS56157841A (en) Detecting apparatus for surface defect of body
SE8304180D0 (sv) Sett och anordning for optisk inspektion
EP0022506A1 (en) Optical measuring apparatus
ATE13353T1 (de) Refraktometer.
JPS5767815A (en) Measuring method for position of reflector using light
JPS5726704A (en) Measuring instrument for three-dimensional shape
JPS56135821A (en) Observing device
JPS5483885A (en) Surface inspector
JPS57111401A (en) External form inspector
GB2022823A (en) A Device for Determining the Quality of the Finish Optical Surfaces
JPS57186106A (en) Inspection device for surface
JPS57173705A (en) Method for checking mask for printed substrate
JPS5737253A (en) Defect detection device for transparent body
JPS5772159A (en) Optical device for transparent original
GB1441386A (en) Scanning apparatus
JPS56126745A (en) Automatic inspecting device for surface of plate material
JPS57178134A (en) Specular surface defect observing device
JPS5728239A (en) Inspection of defect on cylinder surface