JPS56157841A - Detecting apparatus for surface defect of body - Google Patents

Detecting apparatus for surface defect of body

Info

Publication number
JPS56157841A
JPS56157841A JP6101080A JP6101080A JPS56157841A JP S56157841 A JPS56157841 A JP S56157841A JP 6101080 A JP6101080 A JP 6101080A JP 6101080 A JP6101080 A JP 6101080A JP S56157841 A JPS56157841 A JP S56157841A
Authority
JP
Japan
Prior art keywords
inspected
lens
light
image
focused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6101080A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353493B2 (enrdf_load_stackoverflow
Inventor
Shuji Takaoka
Toshihiko Omichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP6101080A priority Critical patent/JPS56157841A/ja
Publication of JPS56157841A publication Critical patent/JPS56157841A/ja
Publication of JPS6353493B2 publication Critical patent/JPS6353493B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6101080A 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body Granted JPS56157841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6101080A JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Publications (2)

Publication Number Publication Date
JPS56157841A true JPS56157841A (en) 1981-12-05
JPS6353493B2 JPS6353493B2 (enrdf_load_stackoverflow) 1988-10-24

Family

ID=13158928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6101080A Granted JPS56157841A (en) 1980-05-07 1980-05-07 Detecting apparatus for surface defect of body

Country Status (1)

Country Link
JP (1) JPS56157841A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150331A (ja) * 1983-02-16 1984-08-28 Toyota Tsusho Kk 球状又は円筒状表面を有する物体の表面検査装置
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム
CN112630232A (zh) * 2020-12-01 2021-04-09 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112666172A (zh) * 2020-12-01 2021-04-16 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置
CN112683918A (zh) * 2020-12-01 2021-04-20 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (enrdf_load_stackoverflow) * 1965-08-28 1969-03-05
JPS4963459A (enrdf_load_stackoverflow) * 1972-10-16 1974-06-19

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS446160Y1 (enrdf_load_stackoverflow) * 1965-08-28 1969-03-05
JPS4963459A (enrdf_load_stackoverflow) * 1972-10-16 1974-06-19

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4547073A (en) * 1981-02-17 1985-10-15 Matsushita Electric Industrial Co., Ltd. Surface examining apparatus and method
JPS59150331A (ja) * 1983-02-16 1984-08-28 Toyota Tsusho Kk 球状又は円筒状表面を有する物体の表面検査装置
JP2011107092A (ja) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk 表面検査装置及び表面検査システム
CN112630232A (zh) * 2020-12-01 2021-04-09 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112666172A (zh) * 2020-12-01 2021-04-16 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置
CN112683918A (zh) * 2020-12-01 2021-04-20 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置
CN112630232B (zh) * 2020-12-01 2021-12-03 北京理工大学 差动共焦定面干涉靶丸内、外表面缺陷检测方法与装置
CN112683918B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸内表面缺陷检测方法与装置
CN112666172B (zh) * 2020-12-01 2022-02-11 北京理工大学 差动共焦定面干涉靶丸外表面缺陷检测方法与装置

Also Published As

Publication number Publication date
JPS6353493B2 (enrdf_load_stackoverflow) 1988-10-24

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