JPS561547A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS561547A
JPS561547A JP7735779A JP7735779A JPS561547A JP S561547 A JPS561547 A JP S561547A JP 7735779 A JP7735779 A JP 7735779A JP 7735779 A JP7735779 A JP 7735779A JP S561547 A JPS561547 A JP S561547A
Authority
JP
Japan
Prior art keywords
film
resist
layer
cvd
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7735779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627699B2 (enrdf_load_stackoverflow
Inventor
Kazuya Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7735779A priority Critical patent/JPS561547A/ja
Publication of JPS561547A publication Critical patent/JPS561547A/ja
Publication of JPS627699B2 publication Critical patent/JPS627699B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7735779A 1979-06-19 1979-06-19 Semiconductor device Granted JPS561547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7735779A JPS561547A (en) 1979-06-19 1979-06-19 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7735779A JPS561547A (en) 1979-06-19 1979-06-19 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS561547A true JPS561547A (en) 1981-01-09
JPS627699B2 JPS627699B2 (enrdf_load_stackoverflow) 1987-02-18

Family

ID=13631650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7735779A Granted JPS561547A (en) 1979-06-19 1979-06-19 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS561547A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972745A (ja) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd 半導体装置
JPS60241235A (ja) * 1984-05-07 1985-11-30 モトローラ・インコーポレーテツド 半導体デバイスの製造方法
JPH0393253A (ja) * 1989-08-31 1991-04-18 Delco Electron Corp 集積回路およびその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250771U (enrdf_load_stackoverflow) * 1988-09-30 1990-04-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972745A (ja) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd 半導体装置
JPS60241235A (ja) * 1984-05-07 1985-11-30 モトローラ・インコーポレーテツド 半導体デバイスの製造方法
JPH0393253A (ja) * 1989-08-31 1991-04-18 Delco Electron Corp 集積回路およびその製造方法

Also Published As

Publication number Publication date
JPS627699B2 (enrdf_load_stackoverflow) 1987-02-18

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