JPS56153757A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56153757A JPS56153757A JP5739380A JP5739380A JPS56153757A JP S56153757 A JPS56153757 A JP S56153757A JP 5739380 A JP5739380 A JP 5739380A JP 5739380 A JP5739380 A JP 5739380A JP S56153757 A JPS56153757 A JP S56153757A
- Authority
- JP
- Japan
- Prior art keywords
- poly
- metal
- film
- mask
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 8
- 239000010408 film Substances 0.000 abstract 4
- 239000010409 thin film Substances 0.000 abstract 3
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 229910021339 platinum silicide Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
- 
        - H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
 
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP5739380A JPS56153757A (en) | 1980-04-30 | 1980-04-30 | Semiconductor device | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP5739380A JPS56153757A (en) | 1980-04-30 | 1980-04-30 | Semiconductor device | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS56153757A true JPS56153757A (en) | 1981-11-27 | 
| JPS6346987B2 JPS6346987B2 (OSRAM) | 1988-09-20 | 
Family
ID=13054369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP5739380A Granted JPS56153757A (en) | 1980-04-30 | 1980-04-30 | Semiconductor device | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPS56153757A (OSRAM) | 
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS5135289A (ja) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | Handotaisochi | 
| JPS51116679A (en) * | 1975-04-05 | 1976-10-14 | Fujitsu Ltd | Diode | 
| JPS5382275A (en) * | 1976-12-28 | 1978-07-20 | Fujitsu Ltd | Production of semiconductor device | 
| JPS53123673A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Manufacture of semiconductor device | 
| JPS5563821A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Semiconductor device | 
- 
        1980
        - 1980-04-30 JP JP5739380A patent/JPS56153757A/ja active Granted
 
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPS5135289A (ja) * | 1974-09-20 | 1976-03-25 | Hitachi Ltd | Handotaisochi | 
| JPS51116679A (en) * | 1975-04-05 | 1976-10-14 | Fujitsu Ltd | Diode | 
| JPS5382275A (en) * | 1976-12-28 | 1978-07-20 | Fujitsu Ltd | Production of semiconductor device | 
| JPS53123673A (en) * | 1977-04-04 | 1978-10-28 | Nec Corp | Manufacture of semiconductor device | 
| JPS5563821A (en) * | 1978-11-06 | 1980-05-14 | Nec Corp | Semiconductor device | 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPS6346987B2 (OSRAM) | 1988-09-20 | 
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