JPS5615093A - Manufacturing method for semiconductor laser element - Google Patents
Manufacturing method for semiconductor laser elementInfo
- Publication number
- JPS5615093A JPS5615093A JP9144079A JP9144079A JPS5615093A JP S5615093 A JPS5615093 A JP S5615093A JP 9144079 A JP9144079 A JP 9144079A JP 9144079 A JP9144079 A JP 9144079A JP S5615093 A JPS5615093 A JP S5615093A
- Authority
- JP
- Japan
- Prior art keywords
- plane
- substrate
- cleavage
- exposed
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 4
- 238000003776 cleavage reaction Methods 0.000 abstract 3
- 229920002120 photoresistant polymer Polymers 0.000 abstract 3
- 230000007017 scission Effects 0.000 abstract 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 2
- 229910001635 magnesium fluoride Inorganic materials 0.000 abstract 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 229910052711 selenium Inorganic materials 0.000 abstract 2
- 239000011669 selenium Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/44—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/38 - H01L21/428
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9144079A JPS5615093A (en) | 1979-07-17 | 1979-07-17 | Manufacturing method for semiconductor laser element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9144079A JPS5615093A (en) | 1979-07-17 | 1979-07-17 | Manufacturing method for semiconductor laser element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5615093A true JPS5615093A (en) | 1981-02-13 |
JPS5640512B2 JPS5640512B2 (ja) | 1981-09-21 |
Family
ID=14026422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9144079A Granted JPS5615093A (en) | 1979-07-17 | 1979-07-17 | Manufacturing method for semiconductor laser element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5615093A (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5956944U (ja) * | 1982-10-05 | 1984-04-13 | 東光株式会社 | モ−タ用コイル |
JPH0245516U (ja) * | 1988-09-16 | 1990-03-28 |
-
1979
- 1979-07-17 JP JP9144079A patent/JPS5615093A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5640512B2 (ja) | 1981-09-21 |
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