JPS56149378A - Manufacture of silicon nitride sintered body - Google Patents
Manufacture of silicon nitride sintered bodyInfo
- Publication number
- JPS56149378A JPS56149378A JP5267980A JP5267980A JPS56149378A JP S56149378 A JPS56149378 A JP S56149378A JP 5267980 A JP5267980 A JP 5267980A JP 5267980 A JP5267980 A JP 5267980A JP S56149378 A JPS56149378 A JP S56149378A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- silicon nitride
- sintered body
- nitride sintered
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5267980A JPS56149378A (en) | 1980-04-21 | 1980-04-21 | Manufacture of silicon nitride sintered body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5267980A JPS56149378A (en) | 1980-04-21 | 1980-04-21 | Manufacture of silicon nitride sintered body |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56149378A true JPS56149378A (en) | 1981-11-19 |
JPS6150907B2 JPS6150907B2 (ja) | 1986-11-06 |
Family
ID=12921561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5267980A Granted JPS56149378A (en) | 1980-04-21 | 1980-04-21 | Manufacture of silicon nitride sintered body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56149378A (ja) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60210574A (ja) * | 1984-03-30 | 1985-10-23 | 工業技術院長 | 高強度耐熱セラミツクス焼結体の製造方法 |
JPS60235768A (ja) * | 1984-05-10 | 1985-11-22 | 石川島播磨重工業株式会社 | 窒化珪素基焼結原料の製造方法 |
US4558018A (en) * | 1983-04-04 | 1985-12-10 | Ngk Insulators, Ltd. | Silicon nitride sintered bodies and a method for producing the same |
JPS6121976A (ja) * | 1984-07-10 | 1986-01-30 | 日本重化学工業株式会社 | 窒化珪素質焼結体の製造方法 |
JPS61186267A (ja) * | 1985-02-14 | 1986-08-19 | 工業技術院長 | β−サイアロン焼結体の製造方法 |
JPS61251578A (ja) * | 1985-04-30 | 1986-11-08 | 住友電気工業株式会社 | 窒化けい素焼結体の製造法 |
JPS61256978A (ja) * | 1985-05-01 | 1986-11-14 | 住友電気工業株式会社 | 窒化けい素焼結体の製造法 |
JPS6230667A (ja) * | 1985-04-08 | 1987-02-09 | 住友電気工業株式会社 | 窒化ケイ素焼結体の製造方法 |
EP0212344A1 (en) * | 1985-08-01 | 1987-03-04 | Gte Laboratories Incorporated | Process for making a homogeneous yttria-alumina doped silicon nitride article |
JPS6270262A (ja) * | 1985-09-19 | 1987-03-31 | 株式会社 リケン | 窒化珪素焼結体の製造方法 |
JPS6279823A (ja) * | 1985-10-02 | 1987-04-13 | Osaka Yogyo Kk | セラミツク濾材の製法 |
JPS62158167A (ja) * | 1985-12-27 | 1987-07-14 | 三菱化学株式会社 | 窒化珪素混合粉末の製造方法 |
JPS6317260A (ja) * | 1985-08-01 | 1988-01-25 | ジ−・テイ−・イ−・ラボラトリ−ズ・インコ−ポレイテツド | 均質なド−プ剤含有窒化珪素物品を製造する方法 |
WO1988001259A1 (fr) * | 1986-08-13 | 1988-02-25 | Hitachi Metals, Ltd. | Produit de filtrage de nitrure d'aluminium et substrat semi-conducteur ainsi forme |
JPH01126276A (ja) * | 1987-11-11 | 1989-05-18 | Inax Corp | セラミック焼結体の製法 |
JPH01264972A (ja) * | 1988-04-14 | 1989-10-23 | Ngk Spark Plug Co Ltd | 酸窒化珪素焼結体の製造方法 |
-
1980
- 1980-04-21 JP JP5267980A patent/JPS56149378A/ja active Granted
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4640903A (en) * | 1983-04-04 | 1987-02-03 | Ngk Insulators, Ltd. | Silicon nitride sintered bodies and a method for producing the same |
US4558018A (en) * | 1983-04-04 | 1985-12-10 | Ngk Insulators, Ltd. | Silicon nitride sintered bodies and a method for producing the same |
JPS60210574A (ja) * | 1984-03-30 | 1985-10-23 | 工業技術院長 | 高強度耐熱セラミツクス焼結体の製造方法 |
JPS60235768A (ja) * | 1984-05-10 | 1985-11-22 | 石川島播磨重工業株式会社 | 窒化珪素基焼結原料の製造方法 |
JPS6121976A (ja) * | 1984-07-10 | 1986-01-30 | 日本重化学工業株式会社 | 窒化珪素質焼結体の製造方法 |
JPS61186267A (ja) * | 1985-02-14 | 1986-08-19 | 工業技術院長 | β−サイアロン焼結体の製造方法 |
JPS6230667A (ja) * | 1985-04-08 | 1987-02-09 | 住友電気工業株式会社 | 窒化ケイ素焼結体の製造方法 |
JPS61251578A (ja) * | 1985-04-30 | 1986-11-08 | 住友電気工業株式会社 | 窒化けい素焼結体の製造法 |
JPS61256978A (ja) * | 1985-05-01 | 1986-11-14 | 住友電気工業株式会社 | 窒化けい素焼結体の製造法 |
EP0212344A1 (en) * | 1985-08-01 | 1987-03-04 | Gte Laboratories Incorporated | Process for making a homogeneous yttria-alumina doped silicon nitride article |
JPS6317260A (ja) * | 1985-08-01 | 1988-01-25 | ジ−・テイ−・イ−・ラボラトリ−ズ・インコ−ポレイテツド | 均質なド−プ剤含有窒化珪素物品を製造する方法 |
JPS6270262A (ja) * | 1985-09-19 | 1987-03-31 | 株式会社 リケン | 窒化珪素焼結体の製造方法 |
JPS6279823A (ja) * | 1985-10-02 | 1987-04-13 | Osaka Yogyo Kk | セラミツク濾材の製法 |
JPS62158167A (ja) * | 1985-12-27 | 1987-07-14 | 三菱化学株式会社 | 窒化珪素混合粉末の製造方法 |
WO1988001259A1 (fr) * | 1986-08-13 | 1988-02-25 | Hitachi Metals, Ltd. | Produit de filtrage de nitrure d'aluminium et substrat semi-conducteur ainsi forme |
JPH01126276A (ja) * | 1987-11-11 | 1989-05-18 | Inax Corp | セラミック焼結体の製法 |
JPH01264972A (ja) * | 1988-04-14 | 1989-10-23 | Ngk Spark Plug Co Ltd | 酸窒化珪素焼結体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6150907B2 (ja) | 1986-11-06 |
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