JPS56147439A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS56147439A JPS56147439A JP5120380A JP5120380A JPS56147439A JP S56147439 A JPS56147439 A JP S56147439A JP 5120380 A JP5120380 A JP 5120380A JP 5120380 A JP5120380 A JP 5120380A JP S56147439 A JPS56147439 A JP S56147439A
- Authority
- JP
- Japan
- Prior art keywords
- nh4oh
- hcl
- concentration
- selectively
- ygayalzp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 abstract 4
- 235000011114 ammonium hydroxide Nutrition 0.000 abstract 4
- 239000007864 aqueous solution Substances 0.000 abstract 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5120380A JPS56147439A (en) | 1980-04-17 | 1980-04-17 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5120380A JPS56147439A (en) | 1980-04-17 | 1980-04-17 | Etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56147439A true JPS56147439A (en) | 1981-11-16 |
JPS6346976B2 JPS6346976B2 (ja) | 1988-09-20 |
Family
ID=12880333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5120380A Granted JPS56147439A (en) | 1980-04-17 | 1980-04-17 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56147439A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5279704A (en) * | 1991-04-23 | 1994-01-18 | Honda Giken Kogyo Kabushiki Kaisha | Method of fabricating semiconductor device |
-
1980
- 1980-04-17 JP JP5120380A patent/JPS56147439A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5279704A (en) * | 1991-04-23 | 1994-01-18 | Honda Giken Kogyo Kabushiki Kaisha | Method of fabricating semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPS6346976B2 (ja) | 1988-09-20 |
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