JPS5754276A - Sankaaensupatsutaringumakunojokyohoho - Google Patents

Sankaaensupatsutaringumakunojokyohoho

Info

Publication number
JPS5754276A
JPS5754276A JP13022380A JP13022380A JPS5754276A JP S5754276 A JPS5754276 A JP S5754276A JP 13022380 A JP13022380 A JP 13022380A JP 13022380 A JP13022380 A JP 13022380A JP S5754276 A JPS5754276 A JP S5754276A
Authority
JP
Japan
Prior art keywords
hydrogen peroxide
aqueous hydrogen
sputtering film
acid
zno sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13022380A
Other languages
English (en)
Other versions
JPS6056433B2 (ja
Inventor
Tasuku Masuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP13022380A priority Critical patent/JPS6056433B2/ja
Publication of JPS5754276A publication Critical patent/JPS5754276A/ja
Publication of JPS6056433B2 publication Critical patent/JPS6056433B2/ja
Expired legal-status Critical Current

Links

JP13022380A 1980-09-18 1980-09-18 酸化亜鉛スパツタリング膜の除去方法 Expired JPS6056433B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13022380A JPS6056433B2 (ja) 1980-09-18 1980-09-18 酸化亜鉛スパツタリング膜の除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13022380A JPS6056433B2 (ja) 1980-09-18 1980-09-18 酸化亜鉛スパツタリング膜の除去方法

Publications (2)

Publication Number Publication Date
JPS5754276A true JPS5754276A (ja) 1982-03-31
JPS6056433B2 JPS6056433B2 (ja) 1985-12-10

Family

ID=15029026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13022380A Expired JPS6056433B2 (ja) 1980-09-18 1980-09-18 酸化亜鉛スパツタリング膜の除去方法

Country Status (1)

Country Link
JP (1) JPS6056433B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123878A (ja) * 1982-01-11 1983-07-23 エンソ−ン・インコ−ポレ−テツド 剥離材
CN1294294C (zh) * 2005-01-26 2007-01-10 中国科学院物理研究所 一种氧化锌材料的化学刻蚀方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123878A (ja) * 1982-01-11 1983-07-23 エンソ−ン・インコ−ポレ−テツド 剥離材
JPS6334231B2 (ja) * 1982-01-11 1988-07-08 Ensoon Inc
CN1294294C (zh) * 2005-01-26 2007-01-10 中国科学院物理研究所 一种氧化锌材料的化学刻蚀方法

Also Published As

Publication number Publication date
JPS6056433B2 (ja) 1985-12-10

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