JPS647526A - Manufacture of semiconductor element - Google Patents
Manufacture of semiconductor elementInfo
- Publication number
- JPS647526A JPS647526A JP16092487A JP16092487A JPS647526A JP S647526 A JPS647526 A JP S647526A JP 16092487 A JP16092487 A JP 16092487A JP 16092487 A JP16092487 A JP 16092487A JP S647526 A JPS647526 A JP S647526A
- Authority
- JP
- Japan
- Prior art keywords
- ingaalasp
- hbr
- etched away
- etching speed
- semiconductor element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To enable InGaAlAsP to be etched away in excellent controllability by a method wherein InGaAlAsP is chemically etched away using an etchant containing Br2 or HBr or both. CONSTITUTION:A solution containing Br or HBr or both is used as an etchant In1-s-tGasAltAs1-uPu(0<=s, t, u>=1). When saturated water solution of liquid Br2 and HBr is used, if the ratio of Br to HBr is set up within the range of 1:60-1:5, sufficient etching speed subject to on dependence on the values of s, t, and u can be assured furthermore, if the etched at that time contains water and the voluminal ratio of Br to water using liquid Br2 is set up within the range of 1:6000-1:150, InGaAlAsP can be etched away at stable etching speed with no roughness on the etching surface. Through these procedures, InGaAlAsP can be etched away at stable etching speed with less dependence on s, t, and u to improve the characteristics of the semiconductor element.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160924A JP2680310B2 (en) | 1987-06-30 | 1987-06-30 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160924A JP2680310B2 (en) | 1987-06-30 | 1987-06-30 | Method for manufacturing semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS647526A true JPS647526A (en) | 1989-01-11 |
JP2680310B2 JP2680310B2 (en) | 1997-11-19 |
Family
ID=15725223
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62160924A Expired - Fee Related JP2680310B2 (en) | 1987-06-30 | 1987-06-30 | Method for manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2680310B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02311034A (en) * | 1989-05-26 | 1990-12-26 | Toshiba Corp | Digital communication system |
JP2015070072A (en) * | 2013-09-27 | 2015-04-13 | Jx日鉱日石金属株式会社 | Compound semiconductor element manufacturing method and etchant |
JP2015512139A (en) * | 2012-01-13 | 2015-04-23 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Method for depositing a group III-V layer on a substrate |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61176122A (en) * | 1985-01-31 | 1986-08-07 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1987
- 1987-06-30 JP JP62160924A patent/JP2680310B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61176122A (en) * | 1985-01-31 | 1986-08-07 | Fujitsu Ltd | Manufacture of semiconductor device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02311034A (en) * | 1989-05-26 | 1990-12-26 | Toshiba Corp | Digital communication system |
JP2015512139A (en) * | 2012-01-13 | 2015-04-23 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Method for depositing a group III-V layer on a substrate |
JP2015070072A (en) * | 2013-09-27 | 2015-04-13 | Jx日鉱日石金属株式会社 | Compound semiconductor element manufacturing method and etchant |
Also Published As
Publication number | Publication date |
---|---|
JP2680310B2 (en) | 1997-11-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |