JPS56134594A - Epitaxial growing method and device of liquid phase - Google Patents

Epitaxial growing method and device of liquid phase

Info

Publication number
JPS56134594A
JPS56134594A JP3503780A JP3503780A JPS56134594A JP S56134594 A JPS56134594 A JP S56134594A JP 3503780 A JP3503780 A JP 3503780A JP 3503780 A JP3503780 A JP 3503780A JP S56134594 A JPS56134594 A JP S56134594A
Authority
JP
Japan
Prior art keywords
growing
solution
substrates
holder
sheets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3503780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6111919B2 (enrdf_load_stackoverflow
Inventor
Masaru Wada
Kunio Ito
Takashi Sugino
Yuichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3503780A priority Critical patent/JPS56134594A/ja
Publication of JPS56134594A publication Critical patent/JPS56134594A/ja
Publication of JPS6111919B2 publication Critical patent/JPS6111919B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP3503780A 1980-03-18 1980-03-18 Epitaxial growing method and device of liquid phase Granted JPS56134594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3503780A JPS56134594A (en) 1980-03-18 1980-03-18 Epitaxial growing method and device of liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3503780A JPS56134594A (en) 1980-03-18 1980-03-18 Epitaxial growing method and device of liquid phase

Publications (2)

Publication Number Publication Date
JPS56134594A true JPS56134594A (en) 1981-10-21
JPS6111919B2 JPS6111919B2 (enrdf_load_stackoverflow) 1986-04-05

Family

ID=12430848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3503780A Granted JPS56134594A (en) 1980-03-18 1980-03-18 Epitaxial growing method and device of liquid phase

Country Status (1)

Country Link
JP (1) JPS56134594A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6111919B2 (enrdf_load_stackoverflow) 1986-04-05

Similar Documents

Publication Publication Date Title
JPS56134594A (en) Epitaxial growing method and device of liquid phase
JPS5596629A (en) Method of epitaxially growing in liquid phase
JPS5320763A (en) Crystal growing method and apparatus
JPS547861A (en) Liquid phase epitaxial growth method
JPS535569A (en) Liquid-phase epitaxial growth method
JPS5478377A (en) Method and apparatus for growing semiconductor crystal
JPS5777096A (en) Liquid phase epitaxial growing apparatus
JPS51141577A (en) Method and apparatus for epitaxial growth in the liquid phase
JPS5777095A (en) Liquid phase epitaxial growing apparatus
JPS52135264A (en) Liquid phase epitaxial growth method
JPS52106673A (en) Crystal growing method and device thereof
JPS52114269A (en) Selective liquid growing method
JPS56155527A (en) Apparatus for liquid phase epitaxial growth
JPS56114898A (en) Method for vapor-phase crystal growth
JPS5379774A (en) Growth method in liquid phase
JPS6476995A (en) Apparatus for growing liquid phase
JPS5432182A (en) Epitaxial growing method in liquid phase
JPS5252183A (en) Multilayer liquid phase growth method
JPS57123898A (en) Preparation of semi-insulating gaas single crystal
JPS5498173A (en) Liquid phase epitaxial growth device
JPS5288276A (en) Liquid-phase epitaxial growth
JPS52115783A (en) Liquid phase epitaxial growth
JPS53108766A (en) Vapor phase growth method of sos film
JPS52114268A (en) Selective liquid growing method
JPS554947A (en) Method of growing liquid phase epitaxial