JPS56128407A - Light interference device - Google Patents

Light interference device

Info

Publication number
JPS56128407A
JPS56128407A JP2806680A JP2806680A JPS56128407A JP S56128407 A JPS56128407 A JP S56128407A JP 2806680 A JP2806680 A JP 2806680A JP 2806680 A JP2806680 A JP 2806680A JP S56128407 A JPS56128407 A JP S56128407A
Authority
JP
Japan
Prior art keywords
light
phase
light path
phase modulator
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2806680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353481B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Ryoji Oshida
Nobuhiko Aoki
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2806680A priority Critical patent/JPS56128407A/ja
Publication of JPS56128407A publication Critical patent/JPS56128407A/ja
Publication of JPS6353481B2 publication Critical patent/JPS6353481B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2806680A 1980-03-07 1980-03-07 Light interference device Granted JPS56128407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2806680A JPS56128407A (en) 1980-03-07 1980-03-07 Light interference device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2806680A JPS56128407A (en) 1980-03-07 1980-03-07 Light interference device

Publications (2)

Publication Number Publication Date
JPS56128407A true JPS56128407A (en) 1981-10-07
JPS6353481B2 JPS6353481B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-24

Family

ID=12238384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2806680A Granted JPS56128407A (en) 1980-03-07 1980-03-07 Light interference device

Country Status (1)

Country Link
JP (1) JPS56128407A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58221104A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd 表面形状測定方法および装置
JPS60211301A (ja) * 1984-04-06 1985-10-23 Matsushita Electric Ind Co Ltd 干渉測定方法
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58221104A (ja) * 1982-06-18 1983-12-22 Hitachi Ltd 表面形状測定方法および装置
JPS60211301A (ja) * 1984-04-06 1985-10-23 Matsushita Electric Ind Co Ltd 干渉測定方法
JPS62129711A (ja) * 1985-11-29 1987-06-12 Toshiba Corp 物体の形状誤差を測定する方法およびその装置

Also Published As

Publication number Publication date
JPS6353481B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-10-24

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