JPS5611332A - Hot-cathode ionization vacuum gauge - Google Patents
Hot-cathode ionization vacuum gaugeInfo
- Publication number
- JPS5611332A JPS5611332A JP8588779A JP8588779A JPS5611332A JP S5611332 A JPS5611332 A JP S5611332A JP 8588779 A JP8588779 A JP 8588779A JP 8588779 A JP8588779 A JP 8588779A JP S5611332 A JPS5611332 A JP S5611332A
- Authority
- JP
- Japan
- Prior art keywords
- electronic current
- control electrode
- grid
- current control
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8588779A JPS5611332A (en) | 1979-07-09 | 1979-07-09 | Hot-cathode ionization vacuum gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8588779A JPS5611332A (en) | 1979-07-09 | 1979-07-09 | Hot-cathode ionization vacuum gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5611332A true JPS5611332A (en) | 1981-02-04 |
Family
ID=13871408
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8588779A Pending JPS5611332A (en) | 1979-07-09 | 1979-07-09 | Hot-cathode ionization vacuum gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5611332A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008233079A (ja) * | 2007-03-16 | 2008-10-02 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | 電離真空計 |
JP2008281565A (ja) * | 2007-05-09 | 2008-11-20 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | 電離真空計 |
JP2015062035A (ja) * | 2008-09-19 | 2015-04-02 | エム ケー エス インストルメンツインコーポレーテッドMks Instruments,Incorporated | 電離真空計および圧力測定方法 |
-
1979
- 1979-07-09 JP JP8588779A patent/JPS5611332A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008233079A (ja) * | 2007-03-16 | 2008-10-02 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | 電離真空計 |
US8242783B2 (en) | 2007-03-16 | 2012-08-14 | Tsinghua University | Ionization vacuum gauge |
JP2008281565A (ja) * | 2007-05-09 | 2008-11-20 | Kofukin Seimitsu Kogyo (Shenzhen) Yugenkoshi | 電離真空計 |
JP2015062035A (ja) * | 2008-09-19 | 2015-04-02 | エム ケー エス インストルメンツインコーポレーテッドMks Instruments,Incorporated | 電離真空計および圧力測定方法 |
US9383286B2 (en) | 2008-09-19 | 2016-07-05 | Mks Instruments, Inc. | Ionization gauge with emission current and bias potential control |
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