JPS56102046A - Field evaporation type ion beam generator - Google Patents
Field evaporation type ion beam generatorInfo
- Publication number
- JPS56102046A JPS56102046A JP502480A JP502480A JPS56102046A JP S56102046 A JPS56102046 A JP S56102046A JP 502480 A JP502480 A JP 502480A JP 502480 A JP502480 A JP 502480A JP S56102046 A JPS56102046 A JP S56102046A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion beam
- ion
- needle
- beam generator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Abstract
PURPOSE:To facilitate the adjustment and the stabilization of the discharged ion current with simple electrode construction by providing the electrode for controlling the ion beam in the proximity of needle anode. CONSTITUTION:Conventional electrode and shield electrode in an ion beam generator are eliminated, and an ion beam control electrode 10 which can adjust and stabilize the discharge ion current is provided in the proximity of a needle anode 1. Strong field is provided at the tip of the needle anode 1 by main acceleration power source 8 between the cathode 7, and the discharge ion is provided and accelerated from an ion source 2 which is in fused condition by means of a heater 4 toward the cathode 7. At this time a voltage which is positive or negative against the needle electrode 1 is applied from an adjusting power source 11 to the control electrode 10. Consequently the field at the tip of the needle anode is adjusted accordingly to adjust the discharging ion current. As a result the electrode structure is simplified resulting in the simplification and the cost down of the equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55005024A JPS5831698B2 (en) | 1980-01-18 | 1980-01-18 | Field evaporation type ion beam generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55005024A JPS5831698B2 (en) | 1980-01-18 | 1980-01-18 | Field evaporation type ion beam generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56102046A true JPS56102046A (en) | 1981-08-15 |
| JPS5831698B2 JPS5831698B2 (en) | 1983-07-07 |
Family
ID=11599929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55005024A Expired JPS5831698B2 (en) | 1980-01-18 | 1980-01-18 | Field evaporation type ion beam generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5831698B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112058A (en) * | 1980-02-08 | 1981-09-04 | Hitachi Ltd | High brightness ion source |
| JP2008034371A (en) * | 2006-07-06 | 2008-02-14 | Hitachi High-Technologies Corp | Focused ion beam device |
| WO2017086393A1 (en) * | 2015-11-17 | 2017-05-26 | アトナープ株式会社 | Analysis device and control method therefor |
-
1980
- 1980-01-18 JP JP55005024A patent/JPS5831698B2/en not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56112058A (en) * | 1980-02-08 | 1981-09-04 | Hitachi Ltd | High brightness ion source |
| JP2008034371A (en) * | 2006-07-06 | 2008-02-14 | Hitachi High-Technologies Corp | Focused ion beam device |
| WO2017086393A1 (en) * | 2015-11-17 | 2017-05-26 | アトナープ株式会社 | Analysis device and control method therefor |
| JPWO2017086393A1 (en) * | 2015-11-17 | 2018-04-19 | アトナープ株式会社 | Analysis apparatus and control method thereof |
| US10847356B2 (en) | 2015-11-17 | 2020-11-24 | Atonarp Inc. | Analyzer apparatus and control method |
| US11011360B2 (en) | 2015-11-17 | 2021-05-18 | Atonarp Inc. | Analyzer apparatus and control method |
| US11380533B2 (en) | 2015-11-17 | 2022-07-05 | Atonarp Inc. | Analyzer apparatus and control method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5831698B2 (en) | 1983-07-07 |
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