UST961002I4 - Electron current regulator for an electron discharge device - Google Patents

Electron current regulator for an electron discharge device Download PDF

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Publication number
UST961002I4
UST961002I4 US05/730,548 US73054876A UST961002I4 US T961002 I4 UST961002 I4 US T961002I4 US 73054876 A US73054876 A US 73054876A US T961002 I4 UST961002 I4 US T961002I4
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US
United States
Prior art keywords
electron
discharge device
current regulator
electron discharge
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US05/730,548
Inventor
Alan V. Hall
Ollie C. Woodard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to US05/730,548 priority Critical patent/UST961002I4/en
Application granted granted Critical
Publication of UST961002I4 publication Critical patent/UST961002I4/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Details Of Television Scanning (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

circuit for controlling the electron discharge from a cathode, of an electron discharge device, which provides a control voltage signal, proportional to the cathode current, for comparison with a reference value to provide a correction bias to a grid interposed between the cathode and an anode.
US05/730,548 1975-01-20 1976-10-07 Electron current regulator for an electron discharge device Pending UST961002I4 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/730,548 UST961002I4 (en) 1975-01-20 1976-10-07 Electron current regulator for an electron discharge device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54246275A 1975-01-20 1975-01-20
US05/730,548 UST961002I4 (en) 1975-01-20 1976-10-07 Electron current regulator for an electron discharge device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US54246275A Continuation 1975-01-20 1975-01-20

Publications (1)

Publication Number Publication Date
UST961002I4 true UST961002I4 (en) 1977-08-02

Family

ID=27067042

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/730,548 Pending UST961002I4 (en) 1975-01-20 1976-10-07 Electron current regulator for an electron discharge device

Country Status (1)

Country Link
US (1) UST961002I4 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392355B1 (en) 2000-04-25 2002-05-21 Mcnc Closed-loop cold cathode current regulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6392355B1 (en) 2000-04-25 2002-05-21 Mcnc Closed-loop cold cathode current regulator
US6492781B2 (en) 2000-04-25 2002-12-10 Mcnc Closed-loop cold cathode current regulator

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