JPS5590190A - Defect detector - Google Patents

Defect detector

Info

Publication number
JPS5590190A
JPS5590190A JP16228778A JP16228778A JPS5590190A JP S5590190 A JPS5590190 A JP S5590190A JP 16228778 A JP16228778 A JP 16228778A JP 16228778 A JP16228778 A JP 16228778A JP S5590190 A JPS5590190 A JP S5590190A
Authority
JP
Japan
Prior art keywords
signal
defect
binary
inspected object
comp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16228778A
Other languages
Japanese (ja)
Inventor
Yasukazu Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP16228778A priority Critical patent/JPS5590190A/en
Publication of JPS5590190A publication Critical patent/JPS5590190A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To detect with high precision the existence of a defect on the surface of an inspected object by coding accurately a fine defect signal into a binary signal by comparing a pickup signal with different fixed threshold levels.
CONSTITUTION: An inspected object irradiated uniformly is picture-taken by pickup unit TV such as a television camera and its pickup signal is coded into a binary signal by comparators COMP1∼COMPn differing in fixed threshold level. Next, the binary-coded signal is inputted to one terminal of OR circuit OG by way of FF1∼FFn counting pulses and NAND circuits NG1∼NGn, and the output of comparator COMP0 is led to the other terminal. As a result, when no defect resides on the surface of the inspected object, OR circuit OG generates only one pulse, but when a defect exists, it outputs not less than two pulses. In this way, a fine defect signal can also be code into a binary signal and, therefore, a fine defect can be detected with high precision.
COPYRIGHT: (C)1980,JPO&Japio
JP16228778A 1978-12-27 1978-12-27 Defect detector Pending JPS5590190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16228778A JPS5590190A (en) 1978-12-27 1978-12-27 Defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16228778A JPS5590190A (en) 1978-12-27 1978-12-27 Defect detector

Publications (1)

Publication Number Publication Date
JPS5590190A true JPS5590190A (en) 1980-07-08

Family

ID=15751610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16228778A Pending JPS5590190A (en) 1978-12-27 1978-12-27 Defect detector

Country Status (1)

Country Link
JP (1) JPS5590190A (en)

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