JPS5587003A - Film-thickness measuring method - Google Patents

Film-thickness measuring method

Info

Publication number
JPS5587003A
JPS5587003A JP16174978A JP16174978A JPS5587003A JP S5587003 A JPS5587003 A JP S5587003A JP 16174978 A JP16174978 A JP 16174978A JP 16174978 A JP16174978 A JP 16174978A JP S5587003 A JPS5587003 A JP S5587003A
Authority
JP
Japan
Prior art keywords
light
thin film
reflected
substrate
reflectivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16174978A
Other languages
English (en)
Other versions
JPS6122881B2 (ja
Inventor
Toshihiko Ayusawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP16174978A priority Critical patent/JPS5587003A/ja
Publication of JPS5587003A publication Critical patent/JPS5587003A/ja
Publication of JPS6122881B2 publication Critical patent/JPS6122881B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP16174978A 1978-12-25 1978-12-25 Film-thickness measuring method Granted JPS5587003A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16174978A JPS5587003A (en) 1978-12-25 1978-12-25 Film-thickness measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16174978A JPS5587003A (en) 1978-12-25 1978-12-25 Film-thickness measuring method

Publications (2)

Publication Number Publication Date
JPS5587003A true JPS5587003A (en) 1980-07-01
JPS6122881B2 JPS6122881B2 (ja) 1986-06-03

Family

ID=15741149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16174978A Granted JPS5587003A (en) 1978-12-25 1978-12-25 Film-thickness measuring method

Country Status (1)

Country Link
JP (1) JPS5587003A (ja)

Also Published As

Publication number Publication date
JPS6122881B2 (ja) 1986-06-03

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