JPS5586133A - Preparation of semiconductor element - Google Patents
Preparation of semiconductor elementInfo
- Publication number
- JPS5586133A JPS5586133A JP15764078A JP15764078A JPS5586133A JP S5586133 A JPS5586133 A JP S5586133A JP 15764078 A JP15764078 A JP 15764078A JP 15764078 A JP15764078 A JP 15764078A JP S5586133 A JPS5586133 A JP S5586133A
- Authority
- JP
- Japan
- Prior art keywords
- film
- glass
- heated
- substrate
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: To effect excellent partition by scribing a film protected by glass after the film has been heated in the presence of O2.
CONSTITUTION: In case glass powder attached to a mesa groove 5 is heated, the powder is heated in the presence of O2 so that it can adapt itself to the glass of PbO or ZnO groups to form a glass film 6 of homogeneity and to grow a SiO2 film 7 between the glass film 6 and Si crystallized surface of a substrate 1 while increasing the readiness of wetting between the substrate 1 and the glass film 6. Then the film 6 coated with glass is scribed by a sharp edge of diamond 9, and stress conveyed from the surface of the uniformly formed glass film 6 is centered around the prepared hole, and distortion, if pressed by a roller 10, will divide the film coated on the cleavage. Therefore, no cracking layer toward the inside of the crystal on the pellet side does not occur, nor does the crack of the glass layer as well as the absence of semiconductors.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15764078A JPS5586133A (en) | 1978-12-22 | 1978-12-22 | Preparation of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15764078A JPS5586133A (en) | 1978-12-22 | 1978-12-22 | Preparation of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5586133A true JPS5586133A (en) | 1980-06-28 |
Family
ID=15654135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15764078A Pending JPS5586133A (en) | 1978-12-22 | 1978-12-22 | Preparation of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5586133A (en) |
-
1978
- 1978-12-22 JP JP15764078A patent/JPS5586133A/en active Pending
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