JPS5583025A - Production of image display panel - Google Patents

Abstract

PURPOSE: To improve thickness unevenness and obtain the good display by contacting an auxiliary substrate of a coefficient of thermal expansion larger than that of a semiconductor substrate having been integrated and formed with transistors, etc. to said substrate and bonding a substrate having transparent electrodes on one side and the semiconductor substrate by means of an adhesive spacer.

CONSTITUTION: At the time of assembling the liquid crystal cell by interposing an adhesive agent spacer 18 containing glass fibers between a semiconductor substrate 13 having been integrated and formed with switching elements 1, capacitors, etc. and a transparent substrate 14 having transparent electrode 15 and pressing these under heating, an auxiliary substrate 114 of soda glass plate of a coefficient of thermal expansion larger than that of the silicon substrate 13 is contacted to the substrate 13 and the transparent substrate 14 of quartz glass or the like of a coefficient of thermal expansion smaller than that of the substrate 13 is heated and bonded by using the spacer 18. At this time, the heating temperature is made the clear point or more of the liquid crystal 16. Since the substrate 114 expands larger than the substrates 13, 14, the substrate 13 is pulled. When the assembly is cooled after the finishing of the bonding, the substrate 13 is secured to the substrate 14 by the spacer 18, whereby its shrinkage is prevented. In this way, the thickness unevenness in the spacing 19 of the cell is improved.

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