JPS5580333A - Manufacture of mos semiconductor device - Google Patents
Manufacture of mos semiconductor deviceInfo
- Publication number
- JPS5580333A JPS5580333A JP15355078A JP15355078A JPS5580333A JP S5580333 A JPS5580333 A JP S5580333A JP 15355078 A JP15355078 A JP 15355078A JP 15355078 A JP15355078 A JP 15355078A JP S5580333 A JPS5580333 A JP S5580333A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- island
- sio
- islands
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 229910052594 sapphire Inorganic materials 0.000 abstract 1
- 239000010980 sapphire Substances 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15355078A JPS5580333A (en) | 1978-12-11 | 1978-12-11 | Manufacture of mos semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15355078A JPS5580333A (en) | 1978-12-11 | 1978-12-11 | Manufacture of mos semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5580333A true JPS5580333A (en) | 1980-06-17 |
| JPS616548B2 JPS616548B2 (enrdf_load_stackoverflow) | 1986-02-27 |
Family
ID=15564951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15355078A Granted JPS5580333A (en) | 1978-12-11 | 1978-12-11 | Manufacture of mos semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5580333A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0215643U (enrdf_load_stackoverflow) * | 1988-07-14 | 1990-01-31 |
-
1978
- 1978-12-11 JP JP15355078A patent/JPS5580333A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS616548B2 (enrdf_load_stackoverflow) | 1986-02-27 |
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