JPS5579870A - Evaporation apparatus for substance in vacuum - Google Patents

Evaporation apparatus for substance in vacuum

Info

Publication number
JPS5579870A
JPS5579870A JP15468878A JP15468878A JPS5579870A JP S5579870 A JPS5579870 A JP S5579870A JP 15468878 A JP15468878 A JP 15468878A JP 15468878 A JP15468878 A JP 15468878A JP S5579870 A JPS5579870 A JP S5579870A
Authority
JP
Japan
Prior art keywords
electrode
filament
ion
electron
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15468878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5614746B2 (enrdf_load_stackoverflow
Inventor
Yasushi Kawashita
Masami Nakasone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Seiki Co Ltd
Original Assignee
Shinko Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Seiki Co Ltd filed Critical Shinko Seiki Co Ltd
Priority to JP15468878A priority Critical patent/JPS5579870A/ja
Publication of JPS5579870A publication Critical patent/JPS5579870A/ja
Publication of JPS5614746B2 publication Critical patent/JPS5614746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP15468878A 1978-12-14 1978-12-14 Evaporation apparatus for substance in vacuum Granted JPS5579870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15468878A JPS5579870A (en) 1978-12-14 1978-12-14 Evaporation apparatus for substance in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15468878A JPS5579870A (en) 1978-12-14 1978-12-14 Evaporation apparatus for substance in vacuum

Publications (2)

Publication Number Publication Date
JPS5579870A true JPS5579870A (en) 1980-06-16
JPS5614746B2 JPS5614746B2 (enrdf_load_stackoverflow) 1981-04-06

Family

ID=15589745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15468878A Granted JPS5579870A (en) 1978-12-14 1978-12-14 Evaporation apparatus for substance in vacuum

Country Status (1)

Country Link
JP (1) JPS5579870A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004192903A (ja) * 2002-12-10 2004-07-08 Prazmatec:Kk 電子銃

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62132814U (enrdf_load_stackoverflow) * 1986-02-17 1987-08-21

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54140064U (enrdf_load_stackoverflow) * 1978-03-23 1979-09-28
JPS54140065U (enrdf_load_stackoverflow) * 1978-03-23 1979-09-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54140064U (enrdf_load_stackoverflow) * 1978-03-23 1979-09-28
JPS54140065U (enrdf_load_stackoverflow) * 1978-03-23 1979-09-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004192903A (ja) * 2002-12-10 2004-07-08 Prazmatec:Kk 電子銃

Also Published As

Publication number Publication date
JPS5614746B2 (enrdf_load_stackoverflow) 1981-04-06

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