JPS54140065U - - Google Patents

Info

Publication number
JPS54140065U
JPS54140065U JP3754378U JP3754378U JPS54140065U JP S54140065 U JPS54140065 U JP S54140065U JP 3754378 U JP3754378 U JP 3754378U JP 3754378 U JP3754378 U JP 3754378U JP S54140065 U JPS54140065 U JP S54140065U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3754378U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3754378U priority Critical patent/JPS54140065U/ja
Publication of JPS54140065U publication Critical patent/JPS54140065U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3754378U 1978-03-23 1978-03-23 Pending JPS54140065U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3754378U JPS54140065U (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3754378U JPS54140065U (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Publications (1)

Publication Number Publication Date
JPS54140065U true JPS54140065U (enrdf_load_stackoverflow) 1979-09-28

Family

ID=28900796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3754378U Pending JPS54140065U (enrdf_load_stackoverflow) 1978-03-23 1978-03-23

Country Status (1)

Country Link
JP (1) JPS54140065U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5579870A (en) * 1978-12-14 1980-06-16 Shinko Seiki Kk Evaporation apparatus for substance in vacuum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5579870A (en) * 1978-12-14 1980-06-16 Shinko Seiki Kk Evaporation apparatus for substance in vacuum

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