JPS5578553A - Manufacture of semiconductor - Google Patents
Manufacture of semiconductorInfo
- Publication number
- JPS5578553A JPS5578553A JP15099478A JP15099478A JPS5578553A JP S5578553 A JPS5578553 A JP S5578553A JP 15099478 A JP15099478 A JP 15099478A JP 15099478 A JP15099478 A JP 15099478A JP S5578553 A JPS5578553 A JP S5578553A
- Authority
- JP
- Japan
- Prior art keywords
- coat
- solution
- nmp
- polyimide
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
PURPOSE: To form polyimide resin coat on the organic titanium compound coat previously formed on the surfaces of a semiconductor and inorganic insulating coat to increase the adhersion of Si or the insulating coat and the polyimide resin coat to each other.
CONSTITUTION: This invention is described in connection with one embodiment thereof herein. The amount of 40.04gr. of diaminodiphenylether is dissolved in 400gr. of N-methylpyrrolidone (NMP), and thus-obtained solution is adjusted to 20°C. The amount of 42.75gr. of dianhydrous pyromellitate (PMDA) and 74gr. of NMP are added to the solution, and the sloution is stirred at 30°C for one hour for obtaining 16.5 poises of polyamidic acid (polyimide precursor) solution (30°C). After forming a transistor, tetra-n-butyl titanate coat is formed on a silicon wafer having silicon oxide protective film over the whole surface thereof by cellophane tape stripping method, and next polyimide coat using polyamidic acid solution.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15099478A JPS5578553A (en) | 1978-12-08 | 1978-12-08 | Manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15099478A JPS5578553A (en) | 1978-12-08 | 1978-12-08 | Manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578553A true JPS5578553A (en) | 1980-06-13 |
Family
ID=15508951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15099478A Pending JPS5578553A (en) | 1978-12-08 | 1978-12-08 | Manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578553A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50134766A (en) * | 1974-04-15 | 1975-10-25 |
-
1978
- 1978-12-08 JP JP15099478A patent/JPS5578553A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50134766A (en) * | 1974-04-15 | 1975-10-25 |
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