JPS5578543A - Semiconductor with insulating-film separated construction - Google Patents

Semiconductor with insulating-film separated construction

Info

Publication number
JPS5578543A
JPS5578543A JP15354678A JP15354678A JPS5578543A JP S5578543 A JPS5578543 A JP S5578543A JP 15354678 A JP15354678 A JP 15354678A JP 15354678 A JP15354678 A JP 15354678A JP S5578543 A JPS5578543 A JP S5578543A
Authority
JP
Japan
Prior art keywords
island
substrate
film
defect
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15354678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6111467B2 (enrdf_load_stackoverflow
Inventor
Koichi Kijima
Hiromi Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15354678A priority Critical patent/JPS5578543A/ja
Publication of JPS5578543A publication Critical patent/JPS5578543A/ja
Publication of JPS6111467B2 publication Critical patent/JPS6111467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP15354678A 1978-12-11 1978-12-11 Semiconductor with insulating-film separated construction Granted JPS5578543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15354678A JPS5578543A (en) 1978-12-11 1978-12-11 Semiconductor with insulating-film separated construction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15354678A JPS5578543A (en) 1978-12-11 1978-12-11 Semiconductor with insulating-film separated construction

Publications (2)

Publication Number Publication Date
JPS5578543A true JPS5578543A (en) 1980-06-13
JPS6111467B2 JPS6111467B2 (enrdf_load_stackoverflow) 1986-04-03

Family

ID=15564865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15354678A Granted JPS5578543A (en) 1978-12-11 1978-12-11 Semiconductor with insulating-film separated construction

Country Status (1)

Country Link
JP (1) JPS5578543A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211748A (en) * 1981-06-23 1982-12-25 Nec Corp Semiconductor device
JPS5877241A (ja) * 1981-11-02 1983-05-10 Nec Corp 半導体集積回路装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57211748A (en) * 1981-06-23 1982-12-25 Nec Corp Semiconductor device
JPS5877241A (ja) * 1981-11-02 1983-05-10 Nec Corp 半導体集積回路装置

Also Published As

Publication number Publication date
JPS6111467B2 (enrdf_load_stackoverflow) 1986-04-03

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