JPS5578543A - Semiconductor with insulating-film separated construction - Google Patents
Semiconductor with insulating-film separated constructionInfo
- Publication number
- JPS5578543A JPS5578543A JP15354678A JP15354678A JPS5578543A JP S5578543 A JPS5578543 A JP S5578543A JP 15354678 A JP15354678 A JP 15354678A JP 15354678 A JP15354678 A JP 15354678A JP S5578543 A JPS5578543 A JP S5578543A
- Authority
- JP
- Japan
- Prior art keywords
- island
- substrate
- film
- defect
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000010276 construction Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 3
- 230000007547 defect Effects 0.000 abstract 3
- 229910052710 silicon Inorganic materials 0.000 abstract 3
- 239000010703 silicon Substances 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15354678A JPS5578543A (en) | 1978-12-11 | 1978-12-11 | Semiconductor with insulating-film separated construction |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15354678A JPS5578543A (en) | 1978-12-11 | 1978-12-11 | Semiconductor with insulating-film separated construction |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5578543A true JPS5578543A (en) | 1980-06-13 |
JPS6111467B2 JPS6111467B2 (enrdf_load_stackoverflow) | 1986-04-03 |
Family
ID=15564865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15354678A Granted JPS5578543A (en) | 1978-12-11 | 1978-12-11 | Semiconductor with insulating-film separated construction |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578543A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211748A (en) * | 1981-06-23 | 1982-12-25 | Nec Corp | Semiconductor device |
JPS5877241A (ja) * | 1981-11-02 | 1983-05-10 | Nec Corp | 半導体集積回路装置 |
-
1978
- 1978-12-11 JP JP15354678A patent/JPS5578543A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57211748A (en) * | 1981-06-23 | 1982-12-25 | Nec Corp | Semiconductor device |
JPS5877241A (ja) * | 1981-11-02 | 1983-05-10 | Nec Corp | 半導体集積回路装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6111467B2 (enrdf_load_stackoverflow) | 1986-04-03 |
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