JPS5570074A - Preparation of junction type field-effect transistor - Google Patents
Preparation of junction type field-effect transistorInfo
- Publication number
- JPS5570074A JPS5570074A JP14365278A JP14365278A JPS5570074A JP S5570074 A JPS5570074 A JP S5570074A JP 14365278 A JP14365278 A JP 14365278A JP 14365278 A JP14365278 A JP 14365278A JP S5570074 A JPS5570074 A JP S5570074A
- Authority
- JP
- Japan
- Prior art keywords
- regions
- porosity
- source
- type
- drain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 230000001590 oxidative effect Effects 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910021426 porous silicon Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14365278A JPS5570074A (en) | 1978-11-20 | 1978-11-20 | Preparation of junction type field-effect transistor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14365278A JPS5570074A (en) | 1978-11-20 | 1978-11-20 | Preparation of junction type field-effect transistor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5570074A true JPS5570074A (en) | 1980-05-27 |
| JPS6146992B2 JPS6146992B2 (enrdf_load_stackoverflow) | 1986-10-16 |
Family
ID=15343761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14365278A Granted JPS5570074A (en) | 1978-11-20 | 1978-11-20 | Preparation of junction type field-effect transistor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5570074A (enrdf_load_stackoverflow) |
-
1978
- 1978-11-20 JP JP14365278A patent/JPS5570074A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6146992B2 (enrdf_load_stackoverflow) | 1986-10-16 |
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