JPS5567143A - Method for manufacturing semiconductor device - Google Patents
Method for manufacturing semiconductor deviceInfo
- Publication number
- JPS5567143A JPS5567143A JP14084178A JP14084178A JPS5567143A JP S5567143 A JPS5567143 A JP S5567143A JP 14084178 A JP14084178 A JP 14084178A JP 14084178 A JP14084178 A JP 14084178A JP S5567143 A JPS5567143 A JP S5567143A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- sio
- openings
- produce
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14084178A JPS5567143A (en) | 1978-11-15 | 1978-11-15 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14084178A JPS5567143A (en) | 1978-11-15 | 1978-11-15 | Method for manufacturing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5567143A true JPS5567143A (en) | 1980-05-21 |
Family
ID=15277952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14084178A Pending JPS5567143A (en) | 1978-11-15 | 1978-11-15 | Method for manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5567143A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57202739A (en) * | 1981-06-05 | 1982-12-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS58134430A (ja) * | 1982-02-04 | 1983-08-10 | Nippon Denso Co Ltd | 半導体装置の製造方法 |
JPS58176927A (ja) * | 1982-04-09 | 1983-10-17 | Oki Electric Ind Co Ltd | 半導体素子の製造方法 |
JPS61199638A (ja) * | 1985-02-28 | 1986-09-04 | Sony Corp | 絶縁膜の形成方法 |
-
1978
- 1978-11-15 JP JP14084178A patent/JPS5567143A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57202739A (en) * | 1981-06-05 | 1982-12-11 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS6326540B2 (ja) * | 1981-06-05 | 1988-05-30 | Mitsubishi Electric Corp | |
JPS58134430A (ja) * | 1982-02-04 | 1983-08-10 | Nippon Denso Co Ltd | 半導体装置の製造方法 |
JPH0345535B2 (ja) * | 1982-02-04 | 1991-07-11 | Nippon Denso Co | |
JPS58176927A (ja) * | 1982-04-09 | 1983-10-17 | Oki Electric Ind Co Ltd | 半導体素子の製造方法 |
JPS61199638A (ja) * | 1985-02-28 | 1986-09-04 | Sony Corp | 絶縁膜の形成方法 |
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