JPS5565435A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS5565435A JPS5565435A JP13960978A JP13960978A JPS5565435A JP S5565435 A JPS5565435 A JP S5565435A JP 13960978 A JP13960978 A JP 13960978A JP 13960978 A JP13960978 A JP 13960978A JP S5565435 A JPS5565435 A JP S5565435A
- Authority
- JP
- Japan
- Prior art keywords
- region
- contacting
- hole
- etching
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To provide a contacting hole having littlt side etching by attaching a lower layer film oxide to a semiconductor substrate and doping only the region, where a contacting hole is to be made, with impurities to speed up etching.
CONSTITUTION: The whole surface of semiconductor substrate 1, which is provided with a contact region 2, is covered with film oxide 3, whereupon a resistor 10 is provided, and here a window 10a for contacting smaller than the region 2 is punched out. Next, the part of the film 3 exposed within the window 10a is doped with the impurities having the concentration equal to, or more than the impurities concentration of PSG film 4 is attached to the whole surface. Thereafter upon this, a registing mask 10 having a window 5a, which is equally large as the former window 10a, is provided, and a contacting hole reaching down to the region 2 is opened by etching on the films 4 and 3. By doing so, etching speed is high on the hole region of the film 3 so that side etching is reduced and the hole is reduced to only in the contacting region.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13960978A JPS5565435A (en) | 1978-11-10 | 1978-11-10 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13960978A JPS5565435A (en) | 1978-11-10 | 1978-11-10 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5565435A true JPS5565435A (en) | 1980-05-16 |
Family
ID=15249261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13960978A Pending JPS5565435A (en) | 1978-11-10 | 1978-11-10 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5565435A (en) |
-
1978
- 1978-11-10 JP JP13960978A patent/JPS5565435A/en active Pending
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