JPS556364A - Production of nd filter - Google Patents

Production of nd filter

Info

Publication number
JPS556364A
JPS556364A JP7894178A JP7894178A JPS556364A JP S556364 A JPS556364 A JP S556364A JP 7894178 A JP7894178 A JP 7894178A JP 7894178 A JP7894178 A JP 7894178A JP S556364 A JPS556364 A JP S556364A
Authority
JP
Japan
Prior art keywords
metal
substrate
metal plates
metal plate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7894178A
Other languages
Japanese (ja)
Inventor
Takaaki Miyashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP7894178A priority Critical patent/JPS556364A/en
Publication of JPS556364A publication Critical patent/JPS556364A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Optical Filters (AREA)

Abstract

PURPOSE: To prolong thin film forming time, make possible controlling within a delicate range of thin film formation and increase adhesion strength to substrate by disposing the substrate on the outer side of opposing electrodes within a vacuum chamber sealed with low pressure gas.
CONSTITUTION: The inside of a vacuum chamber 1 is evacuated through conduit 2 and inert gas such as argon gas is sealed under low pressure. Metal plates 4 and 5 having no wavelength selective absorption in a visible region are opposedly disposed perpendicularly parallel by leaving a specified spacing in the vacuum chamber 1. A metal plate 7 of the same kind as the metal plates 4, 5 is disposed above the metal plates 4, 5 in proximity to their intermediate. To the bottom face thereof is bonded a substrate 8 of a smaller area than the metal plate 7 which becomes the blank for the ND filter. Discharge is caused between the metal plates 4, 5 by connecting the metal plate 7 to the negative electrode side of a DC variable power source 9 and connecting a high voltage power source 6 to the metal plates 4, 5, thereby allowing cations to be formed from the gas. The cations, accelerated by the electric field between the metal electrodes 4 and 5, impinge vigorously against the surface of the metal plate on one side and the atoms of the metal driven out deposit on the surface of the substrate 8.
COPYRIGHT: (C)1980,JPO&Japio
JP7894178A 1978-06-29 1978-06-29 Production of nd filter Pending JPS556364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7894178A JPS556364A (en) 1978-06-29 1978-06-29 Production of nd filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7894178A JPS556364A (en) 1978-06-29 1978-06-29 Production of nd filter

Publications (1)

Publication Number Publication Date
JPS556364A true JPS556364A (en) 1980-01-17

Family

ID=13675900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7894178A Pending JPS556364A (en) 1978-06-29 1978-06-29 Production of nd filter

Country Status (1)

Country Link
JP (1) JPS556364A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159426U (en) * 1983-04-11 1984-10-25 埼玉化工株式会社 Gum pine surgical device
JPS6182705A (en) * 1984-09-28 1986-04-26 株式会社東芝 Electromotive toothbrush

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159426U (en) * 1983-04-11 1984-10-25 埼玉化工株式会社 Gum pine surgical device
JPS6182705A (en) * 1984-09-28 1986-04-26 株式会社東芝 Electromotive toothbrush

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