JPS5558551A - Wiring - Google Patents
WiringInfo
- Publication number
- JPS5558551A JPS5558551A JP13199778A JP13199778A JPS5558551A JP S5558551 A JPS5558551 A JP S5558551A JP 13199778 A JP13199778 A JP 13199778A JP 13199778 A JP13199778 A JP 13199778A JP S5558551 A JPS5558551 A JP S5558551A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- wiring
- layers
- mask
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To strengthen a mask layer and obtain fine wiring, by fitting on a semiconductor base plate a metal layer which becomes wiring, providing on top of this a metal layer which has a large resisting force against the bombardment of an ion beam, covering it with a resist layer, and removing unneeded metal layers by means of a beam.
CONSTITUTION: Ti layer 3, Pt layer 4, and Au layer 5, which are to become wiring layers, are laminated on Si base plate 1, on which required semiconductor elements are fitted. On top of this is provided Ti layer 8, which is to become a milling mask and has a larger resisting force against an ion beam than Au. Next, on top of this is provided resist layer 6 corresponding to the wiring pattern. By irradiating Ar+ and an electron ion beam, exposed layers 3, 5, 4 are scraped off, and only Ti layer 3 is retained, and thereby the effect of beam 7 on elements is precluded by layer 3. Subsequently, layer 8, which has functioned as a mask, and the lowerst layer 3 are removed by chemical ethching, and only internal wiring 9 consisting of layers 5, 4 and 3 is retained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13199778A JPS5558551A (en) | 1978-10-26 | 1978-10-26 | Wiring |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13199778A JPS5558551A (en) | 1978-10-26 | 1978-10-26 | Wiring |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5558551A true JPS5558551A (en) | 1980-05-01 |
Family
ID=15071131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13199778A Pending JPS5558551A (en) | 1978-10-26 | 1978-10-26 | Wiring |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5558551A (en) |
-
1978
- 1978-10-26 JP JP13199778A patent/JPS5558551A/en active Pending
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