JPS5553419A - Chemical treatment device for semiconductor - Google Patents

Chemical treatment device for semiconductor

Info

Publication number
JPS5553419A
JPS5553419A JP12572478A JP12572478A JPS5553419A JP S5553419 A JPS5553419 A JP S5553419A JP 12572478 A JP12572478 A JP 12572478A JP 12572478 A JP12572478 A JP 12572478A JP S5553419 A JPS5553419 A JP S5553419A
Authority
JP
Japan
Prior art keywords
tank
valve
dilute acid
chemical treatment
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12572478A
Other languages
English (en)
Inventor
Chisato Hashimoto
Kazuhide Kiuchi
Takao Nakazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HARUNA SHIYOUKOU KK
HARUNA SHOKO KK
Nippon Telegraph and Telephone Corp
Original Assignee
HARUNA SHIYOUKOU KK
HARUNA SHOKO KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HARUNA SHIYOUKOU KK, HARUNA SHOKO KK, Nippon Telegraph and Telephone Corp filed Critical HARUNA SHIYOUKOU KK
Priority to JP12572478A priority Critical patent/JPS5553419A/ja
Publication of JPS5553419A publication Critical patent/JPS5553419A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Weting (AREA)
JP12572478A 1978-10-14 1978-10-14 Chemical treatment device for semiconductor Pending JPS5553419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12572478A JPS5553419A (en) 1978-10-14 1978-10-14 Chemical treatment device for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12572478A JPS5553419A (en) 1978-10-14 1978-10-14 Chemical treatment device for semiconductor

Publications (1)

Publication Number Publication Date
JPS5553419A true JPS5553419A (en) 1980-04-18

Family

ID=14917191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12572478A Pending JPS5553419A (en) 1978-10-14 1978-10-14 Chemical treatment device for semiconductor

Country Status (1)

Country Link
JP (1) JPS5553419A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797063B2 (en) 2001-10-01 2004-09-28 Fsi International, Inc. Dispensing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6797063B2 (en) 2001-10-01 2004-09-28 Fsi International, Inc. Dispensing apparatus

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