JPS5539685A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5539685A
JPS5539685A JP11394178A JP11394178A JPS5539685A JP S5539685 A JPS5539685 A JP S5539685A JP 11394178 A JP11394178 A JP 11394178A JP 11394178 A JP11394178 A JP 11394178A JP S5539685 A JPS5539685 A JP S5539685A
Authority
JP
Japan
Prior art keywords
area
buried
type
film
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11394178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153856B2 (enrdf_load_stackoverflow
Inventor
Yutaka Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11394178A priority Critical patent/JPS5539685A/ja
Publication of JPS5539685A publication Critical patent/JPS5539685A/ja
Publication of JPS6153856B2 publication Critical patent/JPS6153856B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11394178A 1978-09-14 1978-09-14 Semiconductor device Granted JPS5539685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11394178A JPS5539685A (en) 1978-09-14 1978-09-14 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11394178A JPS5539685A (en) 1978-09-14 1978-09-14 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5539685A true JPS5539685A (en) 1980-03-19
JPS6153856B2 JPS6153856B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=14625028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11394178A Granted JPS5539685A (en) 1978-09-14 1978-09-14 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5539685A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568817A (en) * 1979-07-04 1981-01-29 Nec Corp Manufacture of semiconductor device
JPS5785227A (en) * 1980-11-17 1982-05-27 Toshiba Corp Manufacture of semiconductor device
JPS59110118A (ja) * 1982-12-15 1984-06-26 Matsushita Electronics Corp 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS568817A (en) * 1979-07-04 1981-01-29 Nec Corp Manufacture of semiconductor device
JPS5785227A (en) * 1980-11-17 1982-05-27 Toshiba Corp Manufacture of semiconductor device
JPS59110118A (ja) * 1982-12-15 1984-06-26 Matsushita Electronics Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6153856B2 (enrdf_load_stackoverflow) 1986-11-19

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