JPS5539602A - Method of forming multilayer interconnection - Google Patents

Method of forming multilayer interconnection

Info

Publication number
JPS5539602A
JPS5539602A JP11170278A JP11170278A JPS5539602A JP S5539602 A JPS5539602 A JP S5539602A JP 11170278 A JP11170278 A JP 11170278A JP 11170278 A JP11170278 A JP 11170278A JP S5539602 A JPS5539602 A JP S5539602A
Authority
JP
Japan
Prior art keywords
film
multilayer interconnection
polycrystal
rise
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11170278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141137B2 (enrdf_load_stackoverflow
Inventor
Shiyoujirou Sugashiro
Akira Shintani
Hisao Nakajima
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11170278A priority Critical patent/JPS5539602A/ja
Publication of JPS5539602A publication Critical patent/JPS5539602A/ja
Publication of JPS6141137B2 publication Critical patent/JPS6141137B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11170278A 1978-09-13 1978-09-13 Method of forming multilayer interconnection Granted JPS5539602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11170278A JPS5539602A (en) 1978-09-13 1978-09-13 Method of forming multilayer interconnection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11170278A JPS5539602A (en) 1978-09-13 1978-09-13 Method of forming multilayer interconnection

Publications (2)

Publication Number Publication Date
JPS5539602A true JPS5539602A (en) 1980-03-19
JPS6141137B2 JPS6141137B2 (enrdf_load_stackoverflow) 1986-09-12

Family

ID=14567982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11170278A Granted JPS5539602A (en) 1978-09-13 1978-09-13 Method of forming multilayer interconnection

Country Status (1)

Country Link
JP (1) JPS5539602A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821843A (ja) * 1981-07-31 1983-02-08 Oki Electric Ind Co Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821843A (ja) * 1981-07-31 1983-02-08 Oki Electric Ind Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6141137B2 (enrdf_load_stackoverflow) 1986-09-12

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