JPS5538084A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS5538084A JPS5538084A JP11207578A JP11207578A JPS5538084A JP S5538084 A JPS5538084 A JP S5538084A JP 11207578 A JP11207578 A JP 11207578A JP 11207578 A JP11207578 A JP 11207578A JP S5538084 A JPS5538084 A JP S5538084A
- Authority
- JP
- Japan
- Prior art keywords
- film
- sio
- type
- integrated circuit
- semiconductor integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 5
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 2
- 230000000873 masking effect Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Landscapes
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207578A JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207578A JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5538084A true JPS5538084A (en) | 1980-03-17 |
| JPS6318331B2 JPS6318331B2 (enrdf_load_stackoverflow) | 1988-04-18 |
Family
ID=14577437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11207578A Granted JPS5538084A (en) | 1978-09-11 | 1978-09-11 | Semiconductor integrated circuit device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5538084A (enrdf_load_stackoverflow) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990885A (enrdf_load_stackoverflow) * | 1972-12-28 | 1974-08-30 | ||
| JPS5065174A (enrdf_load_stackoverflow) * | 1973-09-07 | 1975-06-02 | ||
| JPS51102471A (enrdf_load_stackoverflow) * | 1971-03-17 | 1976-09-09 | Philips Nv | |
| JPS5293282A (en) * | 1976-01-30 | 1977-08-05 | Matsushita Electronics Corp | Manufacture for semiconductor integrated circuit |
-
1978
- 1978-09-11 JP JP11207578A patent/JPS5538084A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51102471A (enrdf_load_stackoverflow) * | 1971-03-17 | 1976-09-09 | Philips Nv | |
| JPS4990885A (enrdf_load_stackoverflow) * | 1972-12-28 | 1974-08-30 | ||
| JPS5065174A (enrdf_load_stackoverflow) * | 1973-09-07 | 1975-06-02 | ||
| JPS5293282A (en) * | 1976-01-30 | 1977-08-05 | Matsushita Electronics Corp | Manufacture for semiconductor integrated circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6318331B2 (enrdf_load_stackoverflow) | 1988-04-18 |
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