JPS5534424A - Electron beam exposing device - Google Patents

Electron beam exposing device

Info

Publication number
JPS5534424A
JPS5534424A JP10638978A JP10638978A JPS5534424A JP S5534424 A JPS5534424 A JP S5534424A JP 10638978 A JP10638978 A JP 10638978A JP 10638978 A JP10638978 A JP 10638978A JP S5534424 A JPS5534424 A JP S5534424A
Authority
JP
Japan
Prior art keywords
frame
tip
tips
substrate
blank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10638978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57644B2 (enrdf_load_stackoverflow
Inventor
Kiyomi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10638978A priority Critical patent/JPS5534424A/ja
Publication of JPS5534424A publication Critical patent/JPS5534424A/ja
Publication of JPS57644B2 publication Critical patent/JPS57644B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Electron Beam Exposure (AREA)
JP10638978A 1978-08-31 1978-08-31 Electron beam exposing device Granted JPS5534424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10638978A JPS5534424A (en) 1978-08-31 1978-08-31 Electron beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10638978A JPS5534424A (en) 1978-08-31 1978-08-31 Electron beam exposing device

Publications (2)

Publication Number Publication Date
JPS5534424A true JPS5534424A (en) 1980-03-11
JPS57644B2 JPS57644B2 (enrdf_load_stackoverflow) 1982-01-07

Family

ID=14432332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10638978A Granted JPS5534424A (en) 1978-08-31 1978-08-31 Electron beam exposing device

Country Status (1)

Country Link
JP (1) JPS5534424A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175520A (ja) * 1984-09-21 1986-04-17 Toshiba Corp パタ−ン形成方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246353U (enrdf_load_stackoverflow) * 1985-09-10 1987-03-20
JPH0283432A (ja) * 1988-09-20 1990-03-23 Mitsui Petrochem Ind Ltd 引張試験機用のホルダー

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6175520A (ja) * 1984-09-21 1986-04-17 Toshiba Corp パタ−ン形成方法

Also Published As

Publication number Publication date
JPS57644B2 (enrdf_load_stackoverflow) 1982-01-07

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