JPS5531139A - Ion-treating apparatus - Google Patents

Ion-treating apparatus

Info

Publication number
JPS5531139A
JPS5531139A JP10359978A JP10359978A JPS5531139A JP S5531139 A JPS5531139 A JP S5531139A JP 10359978 A JP10359978 A JP 10359978A JP 10359978 A JP10359978 A JP 10359978A JP S5531139 A JPS5531139 A JP S5531139A
Authority
JP
Japan
Prior art keywords
ion
pulse
vessel
glow discharge
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10359978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122026B2 (enExample
Inventor
Tadashi Matsuzawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NDK Inc
Original Assignee
Nihon Denshi Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi Kogyo KK filed Critical Nihon Denshi Kogyo KK
Priority to JP10359978A priority Critical patent/JPS5531139A/ja
Publication of JPS5531139A publication Critical patent/JPS5531139A/ja
Publication of JPS6122026B2 publication Critical patent/JPS6122026B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP10359978A 1978-08-25 1978-08-25 Ion-treating apparatus Granted JPS5531139A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10359978A JPS5531139A (en) 1978-08-25 1978-08-25 Ion-treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10359978A JPS5531139A (en) 1978-08-25 1978-08-25 Ion-treating apparatus

Publications (2)

Publication Number Publication Date
JPS5531139A true JPS5531139A (en) 1980-03-05
JPS6122026B2 JPS6122026B2 (enExample) 1986-05-29

Family

ID=14358223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10359978A Granted JPS5531139A (en) 1978-08-25 1978-08-25 Ion-treating apparatus

Country Status (1)

Country Link
JP (1) JPS5531139A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004108983A3 (de) * 2003-06-05 2005-05-26 Rossendorf Forschzent Verfahren zur herstellung einer nickelarmen oberfläche auf nitinol
EP2351869A1 (en) * 2002-12-20 2011-08-03 COPPE/UFRJ - Coordenação dos Programas de Pós Graduação de Engenharia da Universidade Federal do Rio de Janeiro Hydrogen diffusion barrier on steel by means of a pulsed-plasma ion-nitriding process
CN111850457A (zh) * 2020-07-29 2020-10-30 扬州大学 一种可控表面渗氮装置及其使用方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2013150639A1 (ja) * 2012-04-05 2015-12-14 株式会社東亜精機工作所 硬化層形成装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2351869A1 (en) * 2002-12-20 2011-08-03 COPPE/UFRJ - Coordenação dos Programas de Pós Graduação de Engenharia da Universidade Federal do Rio de Janeiro Hydrogen diffusion barrier on steel by means of a pulsed-plasma ion-nitriding process
WO2004108983A3 (de) * 2003-06-05 2005-05-26 Rossendorf Forschzent Verfahren zur herstellung einer nickelarmen oberfläche auf nitinol
CN111850457A (zh) * 2020-07-29 2020-10-30 扬州大学 一种可控表面渗氮装置及其使用方法

Also Published As

Publication number Publication date
JPS6122026B2 (enExample) 1986-05-29

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