JPS5530869A - Furnace core tube for use in diffusion furnace and method of washing same - Google Patents

Furnace core tube for use in diffusion furnace and method of washing same

Info

Publication number
JPS5530869A
JPS5530869A JP10458978A JP10458978A JPS5530869A JP S5530869 A JPS5530869 A JP S5530869A JP 10458978 A JP10458978 A JP 10458978A JP 10458978 A JP10458978 A JP 10458978A JP S5530869 A JPS5530869 A JP S5530869A
Authority
JP
Japan
Prior art keywords
gas
core tube
furnace
washing
silicon carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10458978A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335091B2 (cs
Inventor
Susumu Inoue
Isao Sakashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP10458978A priority Critical patent/JPS5530869A/ja
Publication of JPS5530869A publication Critical patent/JPS5530869A/ja
Publication of JPS6335091B2 publication Critical patent/JPS6335091B2/ja
Granted legal-status Critical Current

Links

JP10458978A 1978-08-28 1978-08-28 Furnace core tube for use in diffusion furnace and method of washing same Granted JPS5530869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10458978A JPS5530869A (en) 1978-08-28 1978-08-28 Furnace core tube for use in diffusion furnace and method of washing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10458978A JPS5530869A (en) 1978-08-28 1978-08-28 Furnace core tube for use in diffusion furnace and method of washing same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP11185889A Division JPH0249421A (ja) 1989-04-28 1989-04-28 拡散炉用炉心管の構造

Publications (2)

Publication Number Publication Date
JPS5530869A true JPS5530869A (en) 1980-03-04
JPS6335091B2 JPS6335091B2 (cs) 1988-07-13

Family

ID=14384613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10458978A Granted JPS5530869A (en) 1978-08-28 1978-08-28 Furnace core tube for use in diffusion furnace and method of washing same

Country Status (1)

Country Link
JP (1) JPS5530869A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311622A (ja) * 1989-06-09 1991-01-18 Toshiba Ceramics Co Ltd 排気キャップ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311622A (ja) * 1989-06-09 1991-01-18 Toshiba Ceramics Co Ltd 排気キャップ

Also Published As

Publication number Publication date
JPS6335091B2 (cs) 1988-07-13

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