JPS5528739A - Glass film forming method by photosensitizing treatment - Google Patents
Glass film forming method by photosensitizing treatmentInfo
- Publication number
- JPS5528739A JPS5528739A JP10179578A JP10179578A JPS5528739A JP S5528739 A JPS5528739 A JP S5528739A JP 10179578 A JP10179578 A JP 10179578A JP 10179578 A JP10179578 A JP 10179578A JP S5528739 A JPS5528739 A JP S5528739A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- glass
- film forming
- forming method
- glass film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
PURPOSE: To make selective formation of glass films sure by improving the adhesiveness between photo glass and substrate.
CONSTITUTION: After photo resist 4 is thinly coated on a substrate 1, photo resist 5 containing glass components is coated thereon and is subjected to exposure and development through a mask, whereby part of the films of the photo resist 4 and the photo resist 5 containing glass are selectively removed. Thereafter, the substrate is subjected to firing, whereby the remaining photo resists are flown off and the glass components are sintered on the substrate 1.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10179578A JPS5528739A (en) | 1978-08-23 | 1978-08-23 | Glass film forming method by photosensitizing treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10179578A JPS5528739A (en) | 1978-08-23 | 1978-08-23 | Glass film forming method by photosensitizing treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5528739A true JPS5528739A (en) | 1980-02-29 |
JPS618754B2 JPS618754B2 (en) | 1986-03-17 |
Family
ID=14310084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10179578A Granted JPS5528739A (en) | 1978-08-23 | 1978-08-23 | Glass film forming method by photosensitizing treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5528739A (en) |
-
1978
- 1978-08-23 JP JP10179578A patent/JPS5528739A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS618754B2 (en) | 1986-03-17 |
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