JPS5518087A - Semiconductor laser device and manufacture thereof - Google Patents

Semiconductor laser device and manufacture thereof

Info

Publication number
JPS5518087A
JPS5518087A JP9192478A JP9192478A JPS5518087A JP S5518087 A JPS5518087 A JP S5518087A JP 9192478 A JP9192478 A JP 9192478A JP 9192478 A JP9192478 A JP 9192478A JP S5518087 A JPS5518087 A JP S5518087A
Authority
JP
Japan
Prior art keywords
projection
resistance layers
layer
sides
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9192478A
Other languages
Japanese (ja)
Inventor
Yuichi Shimizu
Kunio Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9192478A priority Critical patent/JPS5518087A/en
Publication of JPS5518087A publication Critical patent/JPS5518087A/en
Pending legal-status Critical Current

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  • Semiconductor Lasers (AREA)

Abstract

PURPOSE: To enclose electrical currents on both the sides of an active region and perform completely-single-spot oscillation, by providing a projection on the surface of a semiconductor substrate, making high-resistance layers on both the sides of the projection, growing layers including the active layer on the entire surface of the projection and the high-resistance layers, making another projection on the uppermost layer and providing other high-resistance layers on both the sides of the latter projection.
CONSTITUTION: A projection is made on the central part of the surface of N-type GaAs substrate 1. High-resistance layers 11 are made from Ga(CH3)3 amd AsH3 by pyrolysis on both the sides of the projection. An N-type Ga0.7Al0.3As layer 2, an N-type GaAs active layer 3, a P-type Ga0.7Al0.3As 4 and a P-type GaAs layer 5 are stratified and epitaxially grown on the entire surface of the projection and the high-resistance layers 11, thereby producing double hetero structures. The part of the layer 5, which is not located just over the projection, is etched off so that the layer 5 is formed to another projection. Other high-resistance layers 11 are provided on both the sides of the projection. A P-side electrode 7 is coated on the flat surface of the latter projection and high-resistance layers. An N-side electrode 8 is coated on the reverse side of the substrate 1.
COPYRIGHT: (C)1980,JPO&Japio
JP9192478A 1978-07-26 1978-07-26 Semiconductor laser device and manufacture thereof Pending JPS5518087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9192478A JPS5518087A (en) 1978-07-26 1978-07-26 Semiconductor laser device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9192478A JPS5518087A (en) 1978-07-26 1978-07-26 Semiconductor laser device and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS5518087A true JPS5518087A (en) 1980-02-07

Family

ID=14040123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9192478A Pending JPS5518087A (en) 1978-07-26 1978-07-26 Semiconductor laser device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5518087A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041839A (en) * 1983-08-17 1985-03-05 Nec Corp Loop type data transmission system
JPS63203898A (en) * 1987-02-19 1988-08-23 大福製紙株式会社 Production of adhesive paper or nonwoven fabric
US5804840A (en) * 1995-06-27 1998-09-08 Mitsubishi Denki Kabushiki Kaisha Semiconductor device structure including InAlAs or InAlGaAs current blocking layers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041839A (en) * 1983-08-17 1985-03-05 Nec Corp Loop type data transmission system
JPH0238029B2 (en) * 1983-08-17 1990-08-28 Nippon Electric Co
JPS63203898A (en) * 1987-02-19 1988-08-23 大福製紙株式会社 Production of adhesive paper or nonwoven fabric
US5804840A (en) * 1995-06-27 1998-09-08 Mitsubishi Denki Kabushiki Kaisha Semiconductor device structure including InAlAs or InAlGaAs current blocking layers

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