JPS5516255A - Measuring device of semiconductor device - Google Patents
Measuring device of semiconductor deviceInfo
- Publication number
- JPS5516255A JPS5516255A JP8904878A JP8904878A JPS5516255A JP S5516255 A JPS5516255 A JP S5516255A JP 8904878 A JP8904878 A JP 8904878A JP 8904878 A JP8904878 A JP 8904878A JP S5516255 A JPS5516255 A JP S5516255A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor chip
- film substrate
- substrate
- pressure rubber
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To accurately measure the various characteristics of a semiconductor chip, by using an insulating substrate forming peripheral circuits, and by directly contacting the measuring terminals of a film substrate made up to a portion lower than the substrate with the electrodes of the semiconductor chip.
CONSTITUTION: When moving an insulating substrate 4, to which a film substrate 11, a spacer 10, a pressure rubber support plate 9, pressure rubber 8, other various electric parts 5, etc. are mounted, in the arrow head direction, terminals 7 installed to the film substrate 11 contact with the electrodes 3 of a semiconductor chip 1 through the fixed pressure of the pressure rubber 8. Thus, this condition becomes equivalent to the mounting of the semiconductor chip 1 to peripheral circuits, and the semiconductor chip can accurately be measured. High-frequency at the semiconductor chip and a wafer can be measured at low cost in the film substrate because the lead length of a conductor of the film substrate 11 can particularly be formed in several mm per one lead.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8904878A JPS5516255A (en) | 1978-07-20 | 1978-07-20 | Measuring device of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8904878A JPS5516255A (en) | 1978-07-20 | 1978-07-20 | Measuring device of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5516255A true JPS5516255A (en) | 1980-02-04 |
Family
ID=13959991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8904878A Pending JPS5516255A (en) | 1978-07-20 | 1978-07-20 | Measuring device of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516255A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60214276A (en) * | 1984-04-11 | 1985-10-26 | Hitachi Ltd | Probing device for integrated circuit component |
-
1978
- 1978-07-20 JP JP8904878A patent/JPS5516255A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60214276A (en) * | 1984-04-11 | 1985-10-26 | Hitachi Ltd | Probing device for integrated circuit component |
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