JPS55152942A - Vibration-proof structure of vacuum apparatus - Google Patents

Vibration-proof structure of vacuum apparatus

Info

Publication number
JPS55152942A
JPS55152942A JP6122479A JP6122479A JPS55152942A JP S55152942 A JPS55152942 A JP S55152942A JP 6122479 A JP6122479 A JP 6122479A JP 6122479 A JP6122479 A JP 6122479A JP S55152942 A JPS55152942 A JP S55152942A
Authority
JP
Japan
Prior art keywords
vacuum
bellows
pump
pipe
exhaust pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6122479A
Other languages
English (en)
Other versions
JPS595179B2 (ja
Inventor
Nobuo Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=13165015&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS55152942(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP54061224A priority Critical patent/JPS595179B2/ja
Priority to DE8080301515T priority patent/DE3066806D1/de
Priority to EP80301515A priority patent/EP0019426B2/en
Priority to US06/148,723 priority patent/US4352643A/en
Publication of JPS55152942A publication Critical patent/JPS55152942A/ja
Publication of JPS595179B2 publication Critical patent/JPS595179B2/ja
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Joints Allowing Movement (AREA)
  • Vibration Prevention Devices (AREA)
JP54061224A 1979-05-18 1979-05-18 真空機器の防振構造 Expired JPS595179B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP54061224A JPS595179B2 (ja) 1979-05-18 1979-05-18 真空機器の防振構造
DE8080301515T DE3066806D1 (en) 1979-05-18 1980-05-08 A structure for vibration isolation in an apparatus with a vacuum system
EP80301515A EP0019426B2 (en) 1979-05-18 1980-05-08 A structure for vibration isolation in an apparatus with a vacuum system
US06/148,723 US4352643A (en) 1979-05-18 1980-05-12 Structure for vibration isolation in an apparatus with a vacuum system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54061224A JPS595179B2 (ja) 1979-05-18 1979-05-18 真空機器の防振構造

Publications (2)

Publication Number Publication Date
JPS55152942A true JPS55152942A (en) 1980-11-28
JPS595179B2 JPS595179B2 (ja) 1984-02-03

Family

ID=13165015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54061224A Expired JPS595179B2 (ja) 1979-05-18 1979-05-18 真空機器の防振構造

Country Status (4)

Country Link
US (1) US4352643A (ja)
EP (1) EP0019426B2 (ja)
JP (1) JPS595179B2 (ja)
DE (1) DE3066806D1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158162U (ja) * 1981-03-31 1982-10-04
JPS57158164U (ja) * 1981-03-31 1982-10-04

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3277262D1 (en) * 1982-12-14 1987-10-15 Vacuum Technology Inc Vibration damping arrangement
DE3690477T1 (ja) * 1985-09-24 1987-10-08
US4835972A (en) * 1986-03-13 1989-06-06 Helix Technology Corporation Flex-line vibration isolator and cryopump with vibration isolation
US4862697A (en) * 1986-03-13 1989-09-05 Helix Technology Corporation Cryopump with vibration isolation
US4833899A (en) * 1986-11-14 1989-05-30 Helix Technology Corporation Cryopump with vibration isolation
DE68922798T2 (de) * 1988-08-02 1995-11-16 Canon Kk Montierverfahren.
US5056319A (en) * 1989-03-18 1991-10-15 Leybold Aktiengesellschaft Refrigerator-operated apparatus
DE59000576D1 (de) * 1990-01-18 1993-01-21 Leybold Ag Kaltkopf mit einem nach dem gifford/mc mahon-prinzip arbeitenden refrigerator.
US5349823A (en) * 1992-02-14 1994-09-27 Intel Corporation Integrated refrigerated computer module
US5628195A (en) * 1995-03-01 1997-05-13 Apd Cryogenics, Inc. Vibrationally isolated thermal system for a cryogenically cooled device
US5508518A (en) * 1995-05-03 1996-04-16 International Business Machines Corporation Lithography tool with vibration isolation
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
JP2003049772A (ja) * 2001-08-08 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
GB0402625D0 (en) * 2004-02-06 2004-03-10 Boc Group Plc Vibration damper
IL161900A (en) * 2004-05-09 2011-01-31 Rami Ben Maimon Vibration reliever for vacuum pump
US20080258365A1 (en) * 2004-05-14 2008-10-23 Koninklijke Philips Electronics, N.V. Vibration Damper for Isolator
US7384228B2 (en) * 2004-05-24 2008-06-10 Asml Netherlands B.V. Insertion device, lithographic apparatus with said insertion device and device manufacturing method
DE202004018469U1 (de) 2004-11-29 2006-04-13 Vericold Technologies Gmbh Tieftemperatur-Kryostat
DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
DE102007008859A1 (de) * 2007-02-23 2008-08-28 Oerlikon Leybold Vacuum Gmbh Vakuumleitung
DE102007022121A1 (de) * 2007-05-11 2008-11-13 Oerlikon Leybold Vacuum Gmbh Anordnung aus einer Vakuumpumpe und einem Vakuumrezipienten
JP5537386B2 (ja) * 2010-11-09 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置
CN102635659A (zh) * 2012-04-24 2012-08-15 清华大学 一种扁平型空气隔振器
DE102012019688A1 (de) 2012-10-01 2014-04-03 Dietrich Roscher Anordnung und Verfahren für die Dämpfung von Schwingungen bei mikroskopischen Untersuchungen
US9218935B2 (en) 2013-07-08 2015-12-22 Carl Zeiss Microscopy, Llc Charged particle beam system and method of operating a charged particle beam system
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
DE102014017374B4 (de) * 2014-11-24 2016-09-15 Attocube Systems Ag Tisch
CN105179265A (zh) * 2015-09-11 2015-12-23 湖州周吴鼎盛化工有限公司 一种真空泵
JP6484601B2 (ja) * 2016-11-24 2019-03-13 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 処理装置及び半導体装置の製造方法
CN107559174B (zh) * 2017-09-30 2020-09-22 湖州知谷汽车零部件有限公司 连接真空泵与减震器的连接机构
JP7228612B2 (ja) * 2020-03-27 2023-02-24 株式会社Kokusai Electric 基板処理装置、半導体装置の製造方法、基板処理方法及びプログラム
GB2598762B (en) * 2020-09-11 2024-01-31 Thermo Fisher Scient Bremen Gmbh Coupling for connecting analytical systems with vibrational isolation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1165449A (en) * 1914-10-01 1915-12-28 Chicago Car Heating Company Tubular, collapsible diaphragm for hose-couplings.
US2205831A (en) * 1936-04-17 1940-06-25 Hartman Harry Buxton Air conditioning apparatus
US2496720A (en) * 1946-09-09 1950-02-07 Sidney J Heiman Heater fan mounting
NL112157C (ja) * 1956-09-15
US3284148A (en) * 1965-02-24 1966-11-08 Ramniceanu Tiberiu Justinian Blower-contained vibration-free work bench
DE1514408B1 (de) * 1965-03-02 1970-01-29 Siemens Ag Korpuskularstrahlmikroskop
US3514600A (en) * 1967-11-20 1970-05-26 Parke Davis & Co Flexible conduit means for connecting an electron microscope to a vacuum pump
GB1400389A (en) * 1971-06-23 1975-07-16 Ass Elect Ind Arrangements for supporting a mass with vibration isolation
US4033140A (en) * 1976-04-02 1977-07-05 Air Products And Chemicals, Inc. Refrigeration system for shipping container

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57158162U (ja) * 1981-03-31 1982-10-04
JPS57158164U (ja) * 1981-03-31 1982-10-04
JPS6245421Y2 (ja) * 1981-03-31 1987-12-04
JPS6245419Y2 (ja) * 1981-03-31 1987-12-04

Also Published As

Publication number Publication date
DE3066806D1 (en) 1984-04-12
EP0019426B2 (en) 1991-05-29
JPS595179B2 (ja) 1984-02-03
US4352643A (en) 1982-10-05
EP0019426B1 (en) 1984-03-07
EP0019426A1 (en) 1980-11-26

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