JPS55152161A - Thermal treatment of copper coating - Google Patents
Thermal treatment of copper coatingInfo
- Publication number
- JPS55152161A JPS55152161A JP5853079A JP5853079A JPS55152161A JP S55152161 A JPS55152161 A JP S55152161A JP 5853079 A JP5853079 A JP 5853079A JP 5853079 A JP5853079 A JP 5853079A JP S55152161 A JPS55152161 A JP S55152161A
- Authority
- JP
- Japan
- Prior art keywords
- container
- copper
- ceramic element
- copper layer
- thermal treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title abstract 7
- 229910052802 copper Inorganic materials 0.000 title abstract 7
- 239000010949 copper Substances 0.000 title abstract 7
- 239000011248 coating agent Substances 0.000 title abstract 2
- 238000000576 coating method Methods 0.000 title abstract 2
- 238000007669 thermal treatment Methods 0.000 title abstract 2
- 239000000919 ceramic Substances 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 230000000694 effects Effects 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 238000001179 sorption measurement Methods 0.000 abstract 1
- 230000001131 transforming effect Effects 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Landscapes
- Ceramic Capacitors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Heat Treatment Of Nonferrous Metals Or Alloys (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5853079A JPS607026B2 (ja) | 1979-05-12 | 1979-05-12 | 銅被膜の熱処理法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5853079A JPS607026B2 (ja) | 1979-05-12 | 1979-05-12 | 銅被膜の熱処理法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55152161A true JPS55152161A (en) | 1980-11-27 |
| JPS607026B2 JPS607026B2 (ja) | 1985-02-21 |
Family
ID=13086977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5853079A Expired JPS607026B2 (ja) | 1979-05-12 | 1979-05-12 | 銅被膜の熱処理法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS607026B2 (ja) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848402A (ja) * | 1981-09-17 | 1983-03-22 | 三菱マテリアル株式会社 | 酸化物半導体素子の電極形成方法 |
| DE3311046A1 (de) * | 1982-03-26 | 1983-10-20 | Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto | Verfahren zur herstellung einer elektrode auf einem dielektrischen keramikmaterial fuer hochfrequenzanwendungen |
| JPS60234395A (ja) * | 1984-05-07 | 1985-11-21 | 田中貴金属工業株式会社 | アルミナ基板への銅めつき方法 |
| JPH02130002A (ja) * | 1988-11-09 | 1990-05-18 | Tdk Corp | 高周波用誘電体共振器の電極形成方法 |
| JPH0472696A (ja) * | 1990-07-12 | 1992-03-06 | Narumi China Corp | セラミック多層回路基板の製造方法 |
-
1979
- 1979-05-12 JP JP5853079A patent/JPS607026B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5848402A (ja) * | 1981-09-17 | 1983-03-22 | 三菱マテリアル株式会社 | 酸化物半導体素子の電極形成方法 |
| DE3311046A1 (de) * | 1982-03-26 | 1983-10-20 | Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto | Verfahren zur herstellung einer elektrode auf einem dielektrischen keramikmaterial fuer hochfrequenzanwendungen |
| JPS60234395A (ja) * | 1984-05-07 | 1985-11-21 | 田中貴金属工業株式会社 | アルミナ基板への銅めつき方法 |
| JPH02130002A (ja) * | 1988-11-09 | 1990-05-18 | Tdk Corp | 高周波用誘電体共振器の電極形成方法 |
| JPH0472696A (ja) * | 1990-07-12 | 1992-03-06 | Narumi China Corp | セラミック多層回路基板の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS607026B2 (ja) | 1985-02-21 |
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