JPS5515214A - Manufacturing method of semiconductor intergrated circuit - Google Patents

Manufacturing method of semiconductor intergrated circuit

Info

Publication number
JPS5515214A
JPS5515214A JP8775478A JP8775478A JPS5515214A JP S5515214 A JPS5515214 A JP S5515214A JP 8775478 A JP8775478 A JP 8775478A JP 8775478 A JP8775478 A JP 8775478A JP S5515214 A JPS5515214 A JP S5515214A
Authority
JP
Japan
Prior art keywords
crystal
substrate
oxidized film
impurity
buried layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8775478A
Other languages
English (en)
Inventor
Takashi Imai
Hironori Kitabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8775478A priority Critical patent/JPS5515214A/ja
Publication of JPS5515214A publication Critical patent/JPS5515214A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP8775478A 1978-07-20 1978-07-20 Manufacturing method of semiconductor intergrated circuit Pending JPS5515214A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8775478A JPS5515214A (en) 1978-07-20 1978-07-20 Manufacturing method of semiconductor intergrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8775478A JPS5515214A (en) 1978-07-20 1978-07-20 Manufacturing method of semiconductor intergrated circuit

Publications (1)

Publication Number Publication Date
JPS5515214A true JPS5515214A (en) 1980-02-02

Family

ID=13923720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8775478A Pending JPS5515214A (en) 1978-07-20 1978-07-20 Manufacturing method of semiconductor intergrated circuit

Country Status (1)

Country Link
JP (1) JPS5515214A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893832A (ja) * 1981-11-27 1983-06-03 Matsushita Electric Ind Co Ltd 鉛合金の製造法
JPS58184738A (ja) * 1982-03-30 1983-10-28 レイセオン　カンパニ− 半導体製造方法
JPS63309257A (ja) * 1987-06-12 1988-12-16 Kyushu Kobayashi Kensetsu:Kk 介助装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512379A (ja) * 1974-06-24 1976-01-09 Mitsubishi Electric Corp Fujunbutsukakusanhoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512379A (ja) * 1974-06-24 1976-01-09 Mitsubishi Electric Corp Fujunbutsukakusanhoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893832A (ja) * 1981-11-27 1983-06-03 Matsushita Electric Ind Co Ltd 鉛合金の製造法
JPS58184738A (ja) * 1982-03-30 1983-10-28 レイセオン　カンパニ− 半導体製造方法
JPS63309257A (ja) * 1987-06-12 1988-12-16 Kyushu Kobayashi Kensetsu:Kk 介助装置

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