JPS55149197A - Manufacture of silicon carbide substrate - Google Patents
Manufacture of silicon carbide substrateInfo
- Publication number
- JPS55149197A JPS55149197A JP5613379A JP5613379A JPS55149197A JP S55149197 A JPS55149197 A JP S55149197A JP 5613379 A JP5613379 A JP 5613379A JP 5613379 A JP5613379 A JP 5613379A JP S55149197 A JPS55149197 A JP S55149197A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sic
- temp
- growing
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title abstract 9
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title 1
- 229910010271 silicon carbide Inorganic materials 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 2
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 239000010410 layer Substances 0.000 abstract 2
- 238000002844 melting Methods 0.000 abstract 2
- 230000008018 melting Effects 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
- 239000012808 vapor phase Substances 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5613379A JPS55149197A (en) | 1979-05-07 | 1979-05-07 | Manufacture of silicon carbide substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5613379A JPS55149197A (en) | 1979-05-07 | 1979-05-07 | Manufacture of silicon carbide substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55149197A true JPS55149197A (en) | 1980-11-20 |
| JPS6120519B2 JPS6120519B2 (enrdf_load_stackoverflow) | 1986-05-22 |
Family
ID=13018569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5613379A Granted JPS55149197A (en) | 1979-05-07 | 1979-05-07 | Manufacture of silicon carbide substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55149197A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4588646A (en) * | 1984-10-15 | 1986-05-13 | Athey Jr Robert D | Protective sheet for articles of clothing and the like |
-
1979
- 1979-05-07 JP JP5613379A patent/JPS55149197A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120519B2 (enrdf_load_stackoverflow) | 1986-05-22 |
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